In this paper a new microgripper will be presented. The specific feature is the microfabrication based on a UVlithographic process in microstructurable, photosensitive glass. Technological and manufacturing problems of the gripper will be described. The developed microgripper is actuated by a piezoelectric ceramic (monomorph). Glass microstructures are used as solid state hinges. With the special design of the gripper it is possible to realise a high distance ratio. The deflection of the gripping arms is some hundred micrometers. The gripping forces are a few mN up to 50 mN. The new grippers were fabricated and tested successfully.
In this paper a new development for microgripping will be presented. The main specific features are the on microfabrication based manufacturing, the multi gear ratio motion transmission and the one piece design of the gripper structure. The fabrication of microgripper is based on a UV-lithographic process in microstructurable, photosensitive glass. The most important feature of this new approach is the nonlinear behavior of the motion translation. Compliant mechanisms consisting of hinges with exactly calculated stiffnesses were microfabricated using the microstructuring technologies of the Microsystems. By using the integrated mechanical stop the microgripper is able to change the gearing ratio during the movement. In this way it is possible to get more gripper flexibility compared with just linear transmission (gearing). The combination of the microfabrication, backlash-free and nonlinear motion transmission make the new gripper an innovative approach for the field of microassembly. The new developed grippers were fabricated and tested successfully.
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