Mems-Based “Touch Feeling Scanner” for Quantitative Evaluation of Fingertip Sensation

Nishida, Yoshihiro; Watatani, Kazuki; Terao, Kyohei; Shimokawa, Fusao; Arimoto, Kazutami; Takao, Hidekuni

doi:10.1109/mems46641.2020.9056245

Cited by 4 publications

(2 citation statements)

References 6 publications

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“…Besides the above inspects of sensing technologies, microelectromechanical system (MEMS) technology has been utilized to design force/tactile sensors based on the working principle of capacitive, piezoelectric, piezoresistive, and so on [4,13,24,[30][31][32][33][34][35][36][37][38][39][40][41] for RMIS systems. [4,30,42,43] These MEMS sensors can effectively miniaturize the structural size and support the implementation of sensing array with excellent spatial resolution.…”

Section: Introductionmentioning

confidence: 99%

A Highly Integrated 3D MEMS Force Sensing Module With Variable Sensitivity for Robotic‐Assisted Minimally Invasive Surgery

Hou

Wang

et al. 2023

Adv Funct Materials

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In robotic‐assisted minimally invasive surgery (RMIS), non‐sentient surgical instruments make it impossible for surgeons to perceive operational force during the procedure. To facilitate surgeons with force telepresence during surgery, a highly integrated MEMS‐based piezoresistive 3D force sensing module, which is composed of a MEMS‐based piezoresistive sensor chip, an encapsulation cap with miniature pyramids, and a top elastic layer, is demonstrated. This innovative combined construction allows for rapid replacement of elastic layers with different thicknesses and different Young's modulus, so as to realize an adjustable sensitivity and measurement range for different surgeries. By replacing the elastic layer, the same amount of change in resistance can be achieved for external force of 3 and 10 N in the Z‐axis; the sensitivity in X‐ and Y‐axes can be increased by a maximum of eight and seven times, respectively. Meanwhile, miniature size enables it to be integrated into various surgical instruments’ tip. Experimental demonstrations involving palpation simulated nodule detection of kidney, ex vivo puncture, and threading forces estimation of tissue‐mimicking are conducted to validate the effectiveness of adjusting sensitivity and range. This sensing module is potentially a promising solution for low‐cost and versatility to surgical instruments, which can facilitate unification of force‐sensing/intelligent surgical instruments.

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Section: Introductionmentioning

confidence: 99%

A Highly Integrated 3D MEMS Force Sensing Module With Variable Sensitivity for Robotic‐Assisted Minimally Invasive Surgery

Hou

Wang

et al. 2023

Adv Funct Materials

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“…Although these methods are simple and can measure the surface condition of an object, the measurement data are affected by the contact pressure, speed, and movement of the user. A handy-type tactile scanner that used MEMS has been proposed [15]. The tactile scanner can discriminate surface textures with high sensitivity.…”

Section: Introductionmentioning

confidence: 99%

Handy-Type Tactile Sensor for Object Recognition Using Convolutional Neural Networks

Tsuji

Kohama

2022

JIIAE

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Tactile sensation obtained from touch is one of the most important factors that determine the impression of an object. A method for identifying tactile textures is required because individual differences exist in feeling of tactile textures. In this study, we propose a handy-type tactile sensor for object recognition using convolutional neural networks (CNNs). The sensor consists of a three-axis pressure sensor and an optical motion sensor for a mouse and can detect time-series data. The object is identified using CNN from the time-series data, namely, pressure and speed of the sensor, when the sensor is moved by a user using a hand. Thus, the sensor system configuration is simple without needing a drive device, and it can be possibly constructed at a low cost. Fifteen types of objects were identified using the prototype sensor. The total average correct recognition rate by one specific user in this study was 77%. Further, the total average recognition rate by four separate users without considering each individual use of the sensor system was 48%. Although the problem in individual identification remained, this result demonstrated the potential for identification application. The proposed sensor system can be used as a functional and useful device.

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Mems-Based “Multi-Tactile Scanner” With 100μm Spatial Resolution of Hardness

Nishida

Watatani

Terao

et al. 2021

2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)

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Mems-Based “Touch Feeling Scanner” for Quantitative Evaluation of Fingertip Sensation

Cited by 4 publications

References 6 publications

A Highly Integrated 3D MEMS Force Sensing Module With Variable Sensitivity for Robotic‐Assisted Minimally Invasive Surgery

A Highly Integrated 3D MEMS Force Sensing Module With Variable Sensitivity for Robotic‐Assisted Minimally Invasive Surgery

Handy-Type Tactile Sensor for Object Recognition Using Convolutional Neural Networks

Mems-Based “Multi-Tactile Scanner” With 100μm Spatial Resolution of Hardness

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