2023
DOI: 10.1002/adfm.202302812
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A Highly Integrated 3D MEMS Force Sensing Module With Variable Sensitivity for Robotic‐Assisted Minimally Invasive Surgery

Abstract: In robotic‐assisted minimally invasive surgery (RMIS), non‐sentient surgical instruments make it impossible for surgeons to perceive operational force during the procedure. To facilitate surgeons with force telepresence during surgery, a highly integrated MEMS‐based piezoresistive 3D force sensing module, which is composed of a MEMS‐based piezoresistive sensor chip, an encapsulation cap with miniature pyramids, and a top elastic layer, is demonstrated. This innovative combined construction allows for rapid rep… Show more

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Cited by 9 publications
(3 citation statements)
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“…Miniaturized sensors integrated into surgical instruments provide surgeons with precise feedback, enabling optimal decision-making during procedures [50]. Additionally, MEMS-enabled surgical tools facilitate minimally invasive robotic interventions, reducing surgical trauma and accelerating patient recovery [51]. The integration of MEMS sensors into prosthetic devices opens new possibilities for personalized healthcare and enhanced patient outcomes.…”
Section: Future Directionsmentioning
confidence: 99%
“…Miniaturized sensors integrated into surgical instruments provide surgeons with precise feedback, enabling optimal decision-making during procedures [50]. Additionally, MEMS-enabled surgical tools facilitate minimally invasive robotic interventions, reducing surgical trauma and accelerating patient recovery [51]. The integration of MEMS sensors into prosthetic devices opens new possibilities for personalized healthcare and enhanced patient outcomes.…”
Section: Future Directionsmentioning
confidence: 99%
“…Many MEMSs are available on the market and in the literature, but no tactile or force-torque sensors or transducers are included in clinical surgical operations. Recently, some researchers developed a MEMS-based piezoresistive sensor chip with an encapsulation cap with a top elastic layer [4]. In this work, experimental demonstration involved palpation but also the integration of a sensing module onto the forceps [4]; however, experiments were only performed in the laboratory and not in a clinical environment in which sterilisation processes must be performed, which could be dangerous for electronic components.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, some researchers developed a MEMS-based piezoresistive sensor chip with an encapsulation cap with a top elastic layer [4]. In this work, experimental demonstration involved palpation but also the integration of a sensing module onto the forceps [4]; however, experiments were only performed in the laboratory and not in a clinical environment in which sterilisation processes must be performed, which could be dangerous for electronic components. Moreover, a cover to protect electronic components is not simple to create or implement for all environments, such as in the case of surgical robotics [5].…”
Section: Introductionmentioning
confidence: 99%