2021
DOI: 10.3390/mi12010085
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Measurement of Effects of Different Substrates on the Mechanical Properties of Submicron Titanium Nickel Shape Memory Alloy Thin Film Using the Bulge Test

Abstract: This study investigated the effects of different substrates on the mechanical properties of Ti-60at%Ni shape memory alloys (SMA). Two types of samples were prepared for this experiment: (1) a Ti-60at%Ni deposited on SiNx, and (2) a Ti-60at%Ni deposited on SiNx/Cr; both had a 600 nm thick film of Ti-60at%Ni. Deposition was done using the physical vapor deposition (PVD) process, and the microstructural changes and crystallization phase changes were observed through scanning electron microscopy (SEM) and X-ray di… Show more

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Cited by 3 publications
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“…The sample is mounted on a pressure chamber and is pressurized with nitrogen gas controlling the stress. The experiment optimized the hardware of the bulge system used in a previous study [70,71] with the addition of a heating system. The experimental setup of the bulge system is shown in Figure 3.…”
Section: Methodsmentioning
confidence: 99%
“…The sample is mounted on a pressure chamber and is pressurized with nitrogen gas controlling the stress. The experiment optimized the hardware of the bulge system used in a previous study [70,71] with the addition of a heating system. The experimental setup of the bulge system is shown in Figure 3.…”
Section: Methodsmentioning
confidence: 99%