Material and integration challenges for large scale Si quantum computing

Abstract

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Synergy between quantum computing and semiconductor technology

“…As can be seen in Figures 1 and 2, spin-qubit devices look at some level like multi-gate transistors, where single electrons (supplied by implanted source and drain regions) are localized under plunger gates, the occupancy and interactions are controlled by gate voltages, and the spin state of the electron can be controlled by radio-frequency pulses. Accordingly, many advanced semiconductor fabrication facilities, such as Intel 18,19 , CEA Leti together with CNRS 20 , and IMEC 21 are fabricating and optimizing spin qubit devices within their industrial factories. QuTech researchers have recently measured spin-qubit devices fabricated in Intel's 300mm CMOS fabrication facility 18 .…”