ESSDERC 2023 - IEEE 53rd European Solid-State Device Research Conference (ESSDERC) 2023
DOI: 10.1109/essderc59256.2023.10268523
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Transport characterization of CMOS-based devices fabricated with isotopically-enriched 28Si for spin qubit applications

G. Elbaz,
M. Cassé,
V. Labracherie
et al.
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