&lt;title&gt;Status of the development of a 128x128 microshutter array&lt;/title&gt;

Moseley, S. H.; Fettig, Rainer K.; Kutyrev, A.; Li, Mary J.; Mott, D. B.; Woodgate, B. E.

doi:10.1117/12.396500

Cited by 9 publications

(9 citation statements)

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“…The shutters are then released from the silicon substrate by removing the sacrificial oxide layer underneath the shutters. The fabrication of each component was described in detail in previous papers 7,8 . New developments involve the light shields and the back-electrodes.…”

Section: Shutter Array Fabrication Developmentmentioning

confidence: 99%

“…The original design of microshutter arrays was in the format of 128x128 with a pixel size of 100x100 m. The development aspects of these shutter arrays were presented in previous publications 7,8,10 , covering the technical requirements, the fabrication development of 128x128 shutter arrays, the 1-D and 2-D addressing mechanisms, as well as the mechanical and optical testing. The work presented in this paper is primarily on the development of the 128 x 64 microshutter arrays with a pixel size of 100 x 200 m. These arrays were developed for fabrication improvements, the functional testing and the reliability testing.…”

Section: Introductionmentioning

confidence: 99%

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Microshutter array development for the James Webb space telescope

Acuna

Amatucci

et al. 2005

SPIE Proceedings

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Micro Electromechanical System (MEMS) microshutter arrays are being developed at NASA Goddard Space Flight Center for use as a field selector of the Near Infrared Spectrograph (NIRSpec) on the James Webb Space Telescope (JWST). The microshutter arrays are designed for the spontaneous selection of a large number of objects in the sky and the transmission of light to the NIRSpec detector with high contrast. The JWST environment requires cryogenic operation at 35K. Microshutter arrays are fabricated out of silicon-on-insulator (SOI) silicon wafers. Arrays are closepacked silicon nitride membranes with a pixel size of 100x200 m. Individual shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with a minimized mechanical stress concentration. Light shields are processed for blocking light from gaps between shutters and frames. The mechanical shutter arrays are fabricated using MEMS technologies. The processing includes multi-layer metal depositions, the patterning of magnetic stripes and shutter electrodes, a reactive ion etching (RIE) to form shutters out of the nitride membrane, an anisotropic back-etch for wafer thinning, followed by a deep RIE (DRIE) back-etch to form mechanical supporting grids and release shutters from the silicon substrate. An additional metal deposition is used to form back electrodes. Shutters are actuated by a magnetic force and latched using an electrostatic force. Optical tests, addressing tests, and life tests are conducted to evaluate the performance and the reliability of microshutter arrays.

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Section: Shutter Array Fabrication Developmentmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Microshutter array development for the James Webb space telescope

Acuna

Amatucci

et al. 2005

SPIE Proceedings

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“…Here a field selector will be necessary. The most variable realization of a reconfigurable field selector is a two-dimensional MEMS such as a micro mirror 3, 4, 5 or a micro shutter array 6,7 .…”

Section: Introductionmentioning

confidence: 99%

<title>Novel optical MEMS/micromechanical devices as field selectors for imaging spectrometry</title>

Riesenberg¹,

Wuttig²

2001

SPIE Proceedings

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Multi-object spectrometry is a special version of imaging spectrometry, where only a relatively small number of objects or interesting image points of a scene is spectrally resolved. This allows to measure nearly all interesting points of a typical astronomical scene within one or only a few measurement steps. The essential component of a multi-object spectrometer is the field selector device, which selects multiple image points for a simultaneous measurement. Reconfigurable field selectors or reconfigurable slit masks can be MEMS, such as micro mirror or micro shutter arrays.Alternative field selectors will be based on micro-mechanical devices and can mostly be referred to as slit positioning systems, since the elements which form the slits are mechanically positioned. Novel examples for such field selectors are an individual micro-mirror element positioner and bar arrays with slit structures. Two layer devices are presented, which form transmissive and reflective slits.The concepts are focused on the near infrared multi-object-spectrometer for the Next Generation Space Telescope.

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“…We will show an instrument derived from FORTIS will have the sensitivity to directly search for Lyman continuum radiation escaping from a significant number of these galaxies. By replacing the long-slit of the new spectrograph with a microshutter array, 7 a unique and powerful multi-object spectrograph is generated with the capability of recording far ultraviolet spectra from large numbers of the widely separated very blue galaxies.…”

Section: Science Drivers and Development Planmentioning

confidence: 99%

FORTIS: pathfinder to the Lyman continuum

McCandliss

Feldman

Glazebrook

et al. 2004

UV and Gamma-Ray Space Telescope Systems

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Shull et al. 4 have asserted that the contribution of stars, relative to quasars, to the metagalactic background radiation that ionizes most of the baryons in the universe remains almost completely unknown at all epochs. The potential to directly quantify this contribution at low redshift has recently become possible with the identification by GALEX of large numbers of sparsely distributed faint ultraviolet galaxies. Neither STIS nor FUSE nor GALEX have the ability to efficiently survey these sparse fields and directly measure the Lyman continuum radiation that may leak into the low redshift (z < 0.4) intergalactic medium. We present here a design for a new type of far ultraviolet spectrograph, one that is more sensitive, covers wider fields, and can provide spectra and images of a large number of objects simultaneously, called the Farultraviolet Off Rowland-circle Telescope for Imaging and Spectroscopy (FORTIS). We intend to use a sounding rocket flight to validate the new instrument with a simple long-slit observation of the starburst populations in the galaxy M83. If however, the long-slit were replaced with microshutter array, this design could isolate the chains of blue galaxies found by GALEX over an ≈ 30' diameter field-of-view and directly address the Lyman continuum problem in a long duration orbital mission. Thus, our development of the sounding rocket instrument is a pathfinder to a new wide field spectroscopic technology for enabling the potential discovery of the long hypothesized but elusive Lyman continuum radiation that is thought to leak from low redshift galaxies and contribute to the ionization of the universe.

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<title>Status of the development of a 128x128 microshutter array</title>

Cited by 9 publications

References 0 publications

Microshutter array development for the James Webb space telescope

Microshutter array development for the James Webb space telescope

<title>Novel optical MEMS/micromechanical devices as field selectors for imaging spectrometry</title>

FORTIS: pathfinder to the Lyman continuum

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