2005
DOI: 10.1117/12.581861
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Microshutter array development for the James Webb space telescope

Abstract: Micro Electromechanical System (MEMS) microshutter arrays are being developed at NASA Goddard Space Flight Center for use as a field selector of the Near Infrared Spectrograph (NIRSpec) on the James Webb Space Telescope (JWST). The microshutter arrays are designed for the spontaneous selection of a large number of objects in the sky and the transmission of light to the NIRSpec detector with high contrast. The JWST environment requires cryogenic operation at 35K. Microshutter arrays are fabricated out of silico… Show more

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Cited by 24 publications
(12 citation statements)
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References 10 publications
(15 reference statements)
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“…Our microshutter arrays (MSA) are small prototype devices of the larger arrays developed at Goddard Space Flight Center (GSFC) for use in the Near Infrared Spectrograph (NIRSpec) on the James Webb Space Telescope (JWST). 9 FORTIS will provide the first flight opportunity for this unique device, which is ideally suited to far-UV applications because the shutters are clear apertures devoid of material.…”
Section: Introductionmentioning
confidence: 99%
“…Our microshutter arrays (MSA) are small prototype devices of the larger arrays developed at Goddard Space Flight Center (GSFC) for use in the Near Infrared Spectrograph (NIRSpec) on the James Webb Space Telescope (JWST). 9 FORTIS will provide the first flight opportunity for this unique device, which is ideally suited to far-UV applications because the shutters are clear apertures devoid of material.…”
Section: Introductionmentioning
confidence: 99%
“…Potential MOEMS transmissive microshutter technologies include thermally or electrostatically actuated curling shutters [10][11], magnetically actuated shutter arrays and our preferred technology: electrostatically actuated interference-based shutters.…”
Section: Introductionmentioning
confidence: 99%
“…Existing MOEMS transmissive microshutter technologies [8][9] include thermally actuated bimorph curling shutters, precision machined and micromachined slits that are mechanically moved to change patterns and magnetically actuated shutters. Reliability and speed are key concerns for adaptive CAI applications and hence of these, only the magnetically actuated approach may be suitable but is currently limited in array size and temperature range.…”
Section: Introductionmentioning
confidence: 99%