&lt;title&gt;Fabrication of a microelectromagnetic flow sensor for microflow rate measurement&lt;/title&gt;

Yoon, H.J.; Kim, SoonYoung; Lee, Sang‐Woo; Yang, Sang Sik

doi:10.1117/12.388903

Cited by 7 publications

(6 citation statements)

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“…The EM detection [12,13] offers several attractive features such as direct and linear relationship between the output and flow, less dependence on cross-sectional flow profile, and mechanical robustness due to no moving parts used. EM flow sensors typically have two electrodes located on inner walls of the fluid channel.…”

Section: Intraluminal Cuff For Electromagnetic Flow Sensingmentioning

confidence: 99%

Bulk-Metal-Based Mems Fabricated by Micro-Electro-Discharge Machining

Takahata

Gianchandani

2007

2007 Canadian Conference on Electrical and Computer Engineering

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This paper presents the recent development of microelectro-mechanical systems (MEMS) and devices realized by planar micromachining of metal foils. New types of cardiac stents including sensor-integrated antenna stents, a micromachined Kelvin probe with an integrated actuator, an intraluminal flow sensor cuff, and a mechanically/chemically robust capacitive pressure sensor are reported. Micro-electro-discharge machining (µEDM) and the modified processes were used for the fabrication of the devices with mechanical or electromechanical functionality. The cost-effective manufacturing is potentially available with the use of the batch mode µEDM technology that employs lithographically fabricated microelectrode arrays.

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Section: Intraluminal Cuff For Electromagnetic Flow Sensingmentioning

confidence: 99%

Bulk-Metal-Based Mems Fabricated by Micro-Electro-Discharge Machining

Takahata

Gianchandani

2007

2007 Canadian Conference on Electrical and Computer Engineering

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“…EM detection offers several attractive features, such as a direct and linear relationship between output and flow, less dependence on cross-sectional flow profile, and mechanical robustness as there are no moving parts used (Yoon et al, 2000). EM flow sensors typically have two electrodes located on inner walls of the fluid channel.…”

Section: Intraluminal Cuff For Electromagnetic Flow Sensingmentioning

confidence: 99%

Micro-Electro-Discharge Machining Technologies for MEMS

Takahata¹

2009

Micro Electronic and Mechanical Systems

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“…The electromagnetic and the electrochemical types have advantages like simpler structures, less pressure loss compared with the hydrodynamic type, and neglectable heat generation compared with the thermal type [22], but there is only limited research. This is because the electromagnetic only applies to conductive fluids, while the electrochemical type [23,24] highly depends on fluid properties like fluid type, fluid conductivity, and ion concentration.…”

Section: Introductionmentioning

confidence: 99%

A liquid–metal-based microscale calorimetric in-chip flow sensor for flow rate measuring

Deng,

Ye,

Deng

et al. 2024

J. Micromech. Microeng.

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This work proposes a liquid-metal-based calorimetric micro-flow sensor within a polydimethylsiloxane (PDMS) chip. It can measure the flow rate of fluid in microscale channels, with a range as low as several microliters per minute. This in-chip sensor is proposed to solve the issue of detecting the flow rate in microfluidic systems. To make the sensor compatible with PDMS microfluidic chips, low-melting-point gallium-based alloy and bismuth-based (bi-based) alloy are used to make the micro heater and bi-metal thermocouples, for these alloys can be easily injected into a PDMS chip to form electrodes. To minimize heat resistance (or temperature difference) between fluid and the detecting ends of thermocouples, these ends are directly exposed to liquid in the flow channel with the help of a special reversible bonding technology. Thermocouples are connected in parallel to improve the sensor’s response. A novel method to bond and electrically connect the sensor to a PCB (print circuit board) is also elaborated. Since the calorimetric flow sensor is sensitive to heating power, fluid temperature and environment cooling, a dimensionless parameter less independent of these factors is deduced from heat transfer theory, and this idea is used in result processing to offset the bad effect. Experiments with pure water show that this sensor can be used to detect flow rates, with a resolution up to 4 µl/min/mV and a range of 12 µl/min in this case, and that at different heating powers, the thermal potential results vary significantly whereas the dimensionless results nearly keep the same. Present work indicates that this sensor has the potential to be integrated into a PDMS microfluidic system and to provide accurate and stable results if a dimensionless method is used in data processing.

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<title>Fabrication of a microelectromagnetic flow sensor for microflow rate measurement</title>

Cited by 7 publications

References 0 publications

Bulk-Metal-Based Mems Fabricated by Micro-Electro-Discharge Machining

Bulk-Metal-Based Mems Fabricated by Micro-Electro-Discharge Machining

Micro-Electro-Discharge Machining Technologies for MEMS

A liquid–metal-based microscale calorimetric in-chip flow sensor for flow rate measuring

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