Micro-Electro-Discharge Machining Technologies for MEMS

Takahata, Kenichi

doi:10.5772/7009

Cited by 21 publications

(9 citation statements)

References 39 publications

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“…The material removal takes place by assigning the required breakdown voltage, discharge energy (via pulse generator) and pulse frequency. Large frequencies of more than 200 Hz [15] and small discharge energy 10 −6 -10 −7 J for the generation of every single spark (40-100 V) are essential to get an accurate surface finish (R a 0.1 µm) [14]. Meanwhile, a proper pulse power supply (discharge energy) and high-resolution servofeed mechanism ensure the right spark gap to do the micromachining at an optimum level.…”

Section: Basic Principle and Spark Initiation Phenomenon In Micro-edmmentioning

confidence: 99%

“…The discharging phenomenon ( Fig. 4) of micro-EDM process can be classified into three main different stages named ignition, discharge and interval [15]. When the required pulse voltage (breakdown voltage) is applied nearby gap, an electric field or electric channel gets established between the tool and workpiece.…”

Section: Basic Principle and Spark Initiation Phenomenon In Micro-edmmentioning

confidence: 99%

See 1 more Smart Citation

Recent trends, opportunities and other aspects of micro-EDM for advanced manufacturing: a comprehensive review

Kumar

Singh

Bajpai

2020

J Braz. Soc. Mech. Sci. Eng.

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Micro-electrical discharge machining is an indispensable tool to manufacture the component or parts of components at the micro-level with reasonable accuracy and precision. This article reports a comprehensive overview of micro-EDM along with their recent trends and key challenges. The sparking phenomenon, physical principle of material removal, process capabilities and flexibility with the other machining process are discussed in the initial part of the paper. Major development issues associated with nano-EDM are reviewed, and suggested solutions are proposed. Research and technology gaps enabling the transition from micro-EDM to nano-EDM are examined. The impact of discharge power technology and dielectric circulation is explored. Moreover, this review article explores the sustainability of the system (micro-EDM) through green manufacturing. A state-of-the-art has been studied in various aspects of micro-EDM. The promising future research scope is also noted in micro-EDM as well as in nano-EDM based on the electrical discharge.

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Section: Basic Principle and Spark Initiation Phenomenon In Micro-edmmentioning

confidence: 99%

Section: Basic Principle and Spark Initiation Phenomenon In Micro-edmmentioning

confidence: 99%

Recent trends, opportunities and other aspects of micro-EDM for advanced manufacturing: a comprehensive review

Kumar

Singh

Bajpai

2020

J Braz. Soc. Mech. Sci. Eng.

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“…Although graphite (including HOPG) is a brittle material, µEDM was found to be highly effective in the precision micromachining of this material. 29) To pattern the rotor structure, a commercially available HOPG sheet (K&J Magnetics) with an ∼600 µm thickness was mounted on the stage of a µEDM system (Smaltec International EM203) to electrically couple it with the discharge circuitry. A tungsten electrode of 300 µm diameter was used to pattern the sheet at an applied voltage of 100 V. Figure 5(a) illustrates the machining path involved in the process performed; the blade structures were first formed by creating four perforations (shaded circles in the figure) in the graphite sheet, and then the rotor structure was patterned along the machining trace of the white circle.…”

Section: Fabricationmentioning

confidence: 99%

Exploration of micro-diamagnetic levitation rotor

Zhang

et al. 2017

Jpn. J. Appl. Phys.

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We investigated a micro-diamagnetic levitation rotor system (MDLRS) in which the rotor freely levitates above the magnets. To explore the characteristics of the rotor, we carried out numerical simulations of and experiments on the MDLRS. Numerical simulation results show that the steady-state levitation height of the rotor is 130 µm, which is basically consistent with the experimental result (132 µm). Under the actuation of a regulated nitrogen flow, experimental results from the rotation speed of the rotor show that the maximum rate is 500 rpm at a flow rate of 28.16 sccm. Furthermore, an empirical model of the relationship between the flow rate and the rotation speed is proposed.

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“…Next, the SMA plate is etched from the other side in HNA to thin the structure down to ∼100 μm while protecting the opposite side of the SMA (figure 3(b), step 2). The SMA plate is then patterned using micro-electro-discharge machining (μEDM, EM203, SmalTec International, IL, USA) [39] to shape the cantilever structures as well as the cavity and the perforations noted earlier (figure 3(b), step 3). A sample of the patterned SMA plate is shown in figure 4(b); the actuator array is still tethered to the frame structure at this stage, not only for easier handling, but also for high-precision assembly and bonding of each of the actuators to the heater circuit.…”

Section: Device Fabricationmentioning

confidence: 99%

Wireless microfluidic control with integrated shape-memory-alloy actuators operated by field frequency modulation

Ali

Takahata

2011

J. Micromech. Microeng.

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This paper reports wireless microfluidic control enabled by the selective operation of multiple bulk-micromachined shape-memory-alloy actuators using external radiofrequency magnetic fields. Each shape-memory-alloy actuator is driven by a wireless resonant heater which generates heat only when the field frequency is tuned to the resonant frequency of the heater. Multiple actuators coupled with the heater circuits that are designed to have different resonant frequencies in the range of 135–295 MHz are selectively and simultaneously controlled by modulating the field frequency to the resonant frequencies of the corresponding heaters. A wireless microsyringe device that has three actuator–heater components and a flexible parylene reservoir is developed. The 5 µl reservoir is squeezed by the 5 mm long cantilever-type actuators to eject controlled amount of liquid from the reservoir. Using the device with an acidic solution loaded in the reservoir, sequential modifications of the pH level in the liquid are experimentally demonstrated through the selective control of the three actuators. The thermal characterization of the actuator using infrared imaging shows a temperature increase of 50 °C in 4 s and the full activation of the actuator in 8 s with 300 mW field output power.

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Micro-Electro-Discharge Machining Technologies for MEMS

Cited by 21 publications

References 39 publications

Recent trends, opportunities and other aspects of micro-EDM for advanced manufacturing: a comprehensive review

Recent trends, opportunities and other aspects of micro-EDM for advanced manufacturing: a comprehensive review

Exploration of micro-diamagnetic levitation rotor

Wireless microfluidic control with integrated shape-memory-alloy actuators operated by field frequency modulation

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