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This paper reports a complete micro gas chromatography (μGC) system in which all the components are lithographically microfabricated and electronically interfaced. The components include a bi-directional Knudsen pump, a preconcentrator, separation columns and a pair of capacitive gas detectors; together, these form the iGC3.c2 system. All the fluidic components of the system are fabricated by a common three-mask lithographic process. The Knudsen pump is a thermomolecular pump that provides air flow to the μGC without any moving parts. The film heaters embedded in the separation columns permit temperature programming. The capacitive detectors provide complementary response patterns, enhancing vapor recognition and resolving co-eluting peaks. With the components assembled on printed circuit boards, the system has a footprint of 8×10 cm 2 . Using room air as the carrier gas, the system is used to experimentally demonstrate the analysis of 19 chemicals with concentration levels on the order of parts per million (p.p.m.) and parts per billion (p.p.b.). The tested chemicals include alkanes, aromatic hydrocarbons, aldehydes, halogenated hydrocarbons and terpenes. This set of chemicals represents a variety of common indoor air pollutants, among which benzene, toluene and xylenes (BTX) are of particular interest.

The direct preparation of thermoresponsive monolithic copolymers by photopatterning of a liquid phase consisting of an aqueous solution of N-isopropylacrylamide, N-ethylacrylamide, N,N'-methylenebisacrylamide, and 4,4'-azobis(4-cyanovaleric acid) has been studied and the products used as valves within the channels of microfluidic devices. The volume change associated with the polymer phase transition at its lower critical solution temperature (LCST) leads to the rapid swelling and the deswelling of the 2.5% cross-linked monolithic gel thus enabling the polymer to close or open the channel and to function as a nonmechanically actuated valve. The LCST at which the valve switches was easily adjusted within a range of 35 degrees C-74 degrees C by varying the proportions of the monovinyl monomers in the polymerization mixture. The closed valve holds pressures of up to 18 MPa without noticeable dislocation, structural damage, or leakage. In contrast, following deswelling by raising the temperature above LCST the valve offers no appreciable flow resistance since its large, micrometer-size pores are open. Laser-triggered photobleaching of a fluorescent dye contained in the liquid phase enabled monitoring of flow through the device and determination of the times required to open and close the valve. The valves are characterized by very fast actuation times in a range of 1-4 s depending on the type of device. No changes in performance were observed even after repeated open-close cycling of the valves.

This paper describes a micro-electro-discharge machining (micro-EDM) technique that uses electrode arrays to achieve high parallelism and throughput in the machining. It explores constraints in the fabrication and usage of high aspect ratio LIGA-fabricated electrode arrays, as well as the limits imposed by the pulse discharge circuits on machining rates. An array of 400 Cu electrodes with 20 m diameter was used to machine perforations in 50-m-thick stainless steel. To increase the spatial and temporal multiplicity of discharge pulses, arrays of electrodes with lithographically fabricated interconnect and block-wise independent pulse control resistance-capacitance (RC) circuits are used, resulting in 100 improvement in throughput compared to single electrodes. However, it was found to compromise surface smoothness. A modified pulse generation scheme that exploits the parasitic capacitance of the interconnect offers similarly high machining rates and is more amenable to integration. Stainless steel workpieces of 100 m thickness were machined by 100 m 100 m square cross-section electrodes using in 85 s using an 80-V power supply. Surface smoothness was unaffected by electrode multiplicity. Using electrode arrays with four circuits, batch production of 36 WC-Co gears with 300 m outside diameter and 70 m thickness in 15 min is demonstrated. [692] Index Terms-Electro-discharge machining (EDM), high aspect ratio, LIGA, metal microstructures.

This paper describes electrothermal microactuators that generate rectilinear displacements and forces by leveraging deformations caused by localized thermal stresses. In one manifestation, an electric current is passed through a V-shaped beam anchored at both ends, and thermal expansion caused by joule heating pushes the apex outward. Analytical and finite element models of device performance are presented along with measured results of devices fabricated using electroplated Ni and p ++ Si as structural materials. A maskless process extension for incorporating thermal and electrical isolation is described. Nickel devices with 410-m-long, 6-m-wide, and 3-m-thick beams demonstrate 10 m static displacements at 79 mW input power; silicon devices with 800-m-long, 13.9-m-wide, and 3.7m-thick beams demonstrate 5 m displacement at 180 mW input power. Cascaded silicon devices using three beams of similar dimensions offer comparable displacement with 50-60% savings in power consumption. The peak output forces generated are estimated to be in the range from 1 to 10 mN for the single beam devices and from 0.1 to 1 mN for the cascaded devices. Measured bandwidths are 700 Hz for both. The typical drive voltages used are 12 V, permitting the use of standard electronic interfaces that are generally inadequate for electrostatic actuators.

Abstract-This paper describes two stainless steel microstructures that are microelectrodischarge machined from 50-m-thick planar foil for intraluminal measurements of pressure and flow (with potential for applications ranging from blood vessels to bile ducts). The first structure is an inductive antenna stent (stentenna) with 20-mm length and 3.5-mm expanded diameter. It is coupled with capacitive elements to form resonant LC tanks that can be telemetrically queried. The resulting LC tanks are deployed inside silicone mock arteries using standard angioplasty balloons and used in a passive telemetry scheme to sense changes in pressure and flow. [1733]

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This paper reports on a multipurpose two-axis micropositioner with sub-nanometer position sensing for precise feedback control. Along each axis it has an electrothermal actuator, a capacitive position sensor and a displacement amplifier that provides a gain of 3.37 for the sensor. It is fabricated from custom SOI wafers using dry etching, and each component is electrically and thermally isolated by silicon nitride. For a fabricated device of 65 µm thickness, the measured displacement sensitivity is 0.333 fF nm −1 , which corresponds to 0.3 nm resolution with available laboratory instrumentation. The range is ≈19 µm along each axis for the positioner, which corresponds to 66 µm travel in the sense combs. Using an external parallel inductor, a positioning displacement of 9.6 µm offers a shift of 240 kHz in L-C resonance, corresponding to a sensitivity of 25 Hz nm −1 .