A liquid–metal-based microscale calorimetric in-chip flow sensor for flow rate measuring
Yuqin Deng,
Zi Ye,
Zhongshan Deng
et al.
Abstract:This work proposes a liquid-metal-based calorimetric micro-flow sensor within a polydimethylsiloxane (PDMS) chip. It can measure the flow rate of fluid in microscale channels, with a range as low as several microliters per minute. This in-chip sensor is proposed to solve the issue of detecting the flow rate in microfluidic systems. To make the sensor compatible with PDMS microfluidic chips, low-melting-point gallium-based alloy and bismuth-based (bi-based) alloy are used to make the micro heater and bi-metal t… Show more
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