2000
DOI: 10.1117/12.396508
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<title>Development of individually addressable micromirror arrays for space applications</title>

Abstract: A two dimensional array of individually addressable micro-mirrors with lOOprnxlOOpni pixel size, capable of tilting +1-100 by electrostatic actuation is being developed and fabricated at the Detector Development Laboratory of NASA, GSFC. The development requires integration of CMOS and MEMS fabrication processes. We have completed extensive analytical studies and performed laboratory tests to compare model predictions with actual performance of a 3x3 array. We are testing the address and driver circuit for a 3… Show more

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Cited by 6 publications
(3 citation statements)
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“…8 Subsequently, NASA funded both the scientific and technical concept as Pre-Phase A study, 9 together with an exploration of enabling MEMS technology. 10,11 The development of new technology was made necessary by the particular requirements of the JWST instrument (slit size ~100 micron, cryogenic capability, contrast 2000:1 or higher) which made the DMDs developed by Texas Instruments (TI) for commercial projection systems (Figure 2) unsuitable for JWST. At the same time, the NASA Goddard Space Flight Center (GSFC), the Space Telescope Science Institute and the Kitt Peak National Observatory jointly funded the development of IRMOS, 12,13,14 a multi-object near-IR spectrograph based on a TI DMD of 848×600 elements.…”
Section: Early Developmentsmentioning
confidence: 99%
“…8 Subsequently, NASA funded both the scientific and technical concept as Pre-Phase A study, 9 together with an exploration of enabling MEMS technology. 10,11 The development of new technology was made necessary by the particular requirements of the JWST instrument (slit size ~100 micron, cryogenic capability, contrast 2000:1 or higher) which made the DMDs developed by Texas Instruments (TI) for commercial projection systems (Figure 2) unsuitable for JWST. At the same time, the NASA Goddard Space Flight Center (GSFC), the Space Telescope Science Institute and the Kitt Peak National Observatory jointly funded the development of IRMOS, 12,13,14 a multi-object near-IR spectrograph based on a TI DMD of 848×600 elements.…”
Section: Early Developmentsmentioning
confidence: 99%
“…We first proposed this concept during the concept development phase of NASA's Next Generation Space Telescope (now James Webb Space Telescope --JWST) in early 1996 1 and were subsequently funded by NASA to develop both the scientific and technical concept as a Pre-Phase A study 2,3 and to explore the enabling MEMS technology. 4 JWST ultimately selected a MEMS based approach for the JWST Near Infrared Spectrometer (NIRSPEC -assigned to the European Space Agency as part of its contribution to JWST) that uses a MEMS based micro-shutter array rather than our MMA reflective design (see presentations by Moseley et al)…”
Section: Introductionmentioning
confidence: 99%
“…Here a reconfigurable field selector will be necessary. In its most variable realization such a reconfigurable field selector is a two-dimensional MEMS device such as a micro mirror 8,9 or micro shutter 10,11 array. Another possibility for the realization of a two-dimensional spatial light modulator is given by slit positioning systems.…”
Section: Introductionmentioning
confidence: 99%