A two dimensional array of individually addressable micro-mirrors with lOOprnxlOOpni pixel size, capable of tilting +1-100 by electrostatic actuation is being developed and fabricated at the Detector Development Laboratory of NASA, GSFC. The development requires integration of CMOS and MEMS fabrication processes. We have completed extensive analytical studies and performed laboratory tests to compare model predictions with actual performance of a 3x3 array. We are testing the address and driver circuit for a 32x32 array and also developing the process integration of the CMOS and MEMS fabrication of the larger arrays. The mirrors are capable of operating at cryogenic temperature for astronomical applications. Our goal is to extend the development to a 256x256 array for a wide variety of space applications including the Multi-Object-Spectrometer in the Next Generation Space Telescope (NGST).
MEMS (Micro-ElectroMechanical Systems) are key technologies for manufacturing in many industrial regions. Today's rapid growth and commercialization of MEMS requires equally rapid product development. Virtual manufacturing, which is usually referred to as computer aided engineering (CAE), enables this rapid product development especially in MEMS world, because computer simulations can address the effect of miniaturization. In this paper, the process of virtual manufacturing on the computer is described step by step through a micro-mirror device, and the numerical result by a CAE tool is compared to the experimental ones obtained from real manufacturing.
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