1996
DOI: 10.1088/0953-2048/9/11/009
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Low- or high-angle Ar ion-beam etching to create ramp-type Josephson junctions

Abstract: The dependence of the ramp geometry on high-or low-angle ion-beam etching, used to structure ramp-type Josephson junctions based on ReBa 2 Cu 3 O 7−δ high-T c superconductors, is investigated by cross-section transmission electron microscopy. The surface quality, interfaces and crystal defects are analysed by high-resolution electron microscopy. Technical difficulties to reproducibly obtain the desired slope angle and shape make high-angle ion-beam etching less interesting although the surface quality is compa… Show more

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Cited by 10 publications
(3 citation statements)
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“…To properly exploit material science recipes, technical steps are also of great importance. For instance, high-angle ion-beam etching [225] or a wet etching step in bromine solution in ethanol before barrier deposition [226], have proved to be of some help to reproducibly obtain the desired slope angle and step in the ramp geometry. Due to the complexity and variety of the materials science issues involved, it is quite difficult to draw a comprehensive picture of the physics of the junctions with artificial barriers.…”
Section: Junctions With An Artificial Barriermentioning
confidence: 99%
“…To properly exploit material science recipes, technical steps are also of great importance. For instance, high-angle ion-beam etching [225] or a wet etching step in bromine solution in ethanol before barrier deposition [226], have proved to be of some help to reproducibly obtain the desired slope angle and step in the ramp geometry. Due to the complexity and variety of the materials science issues involved, it is quite difficult to draw a comprehensive picture of the physics of the junctions with artificial barriers.…”
Section: Junctions With An Artificial Barriermentioning
confidence: 99%
“…We concentrate ourselves here on the special features in the PrBCGaO barrier layer. Other aspects of the microstructure of these JJs have been reported in [11,12]. No special features were found at the interfaces or inside the superconducting layers responsible for the abnormal behaviour of JJs with substitution levels x = 0.7 or 1 for the barrier layer.…”
Section: Ramp-type Jjs With Prbcgao Barrier Layersmentioning
confidence: 76%
“…Hence, the structure, interfaces, and microstructural defects of these ramp-type JJs were studied by HREM and ED. 9,10 In this letter we concentrate on the particularities in the PrBCGaO barrier layer. The junction, discussed here have a ramp angle of 20°-28°and a barrier layer thickness of 10-30 nm.…”
mentioning
confidence: 99%