“…The effect of temperature increase on the Raman spectra of c-Si and different types of silicon nanostructure has been extensively studied. ,− Because of diversities in silicon nanostructures and difficulties in assigning an exact safe value for laser irradiance, controversies in reported laser powers used to acquire Raman spectra exist in the literature. ,− ,, Several works have investigated the effects of different laser wavelengths and powers on the Raman spectra of nanostructured silicon. ,, However, most of them have focused on temperature estimations rather than elucidating correlations between laser-induced heat, chemical alterations, and potential errors resulting from the reversible Raman line shifts. ,,, Also, to the best of our knowledge, there is no evidence of a systematic thermal treatment study to confirm the heat-related observations from laser-induced Raman line shift/broadening.…”