Laser Beam MicroMachining (LBMM) – A review

Mishra, Sanjay; Yadava, Vinod

doi:10.1016/j.optlaseng.2015.03.017

Cited by 227 publications

(101 citation statements)

References 182 publications

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“…Short laser pulses of (sub)-ps range find great interests in material processing, notably in fields like micro-machining for surface functionalization during last few decades [1][2][3]. Under intense irradiation of short pulse, dielectrics first experience moderate excitation via nonlinear photoionization; then, the generated conduction band electrons undergo rapid multiplication by repeated process of laser heating (inverse Bremsstrahlung) and impact ionization.…”

Section: Introductionmentioning

confidence: 99%

Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian–Bessel laser pulse

et al. 2018

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Single-shot Gaussian-Bessel laser beams of 1 ps pulse duration and of ~ 0.9 μm core size and ~ 60 μm depth of focus are used for drilling micro-channels on front side of fused silica in ambient condition. Channels ablated at different pulse energies are fully characterized by AFM and post-processing polishing procedures. We identify experimental energy conditions (typically 1.5 µJ) suitable to fabricate non-tapered channels with mean diameter of ~ 1.2 µm and length of ~ 40 μm while maintaining an utmost quality of the front opening of the channels. In addition, by further applying accurate post-polishing procedure, channels with high surface quality and moderate aspect ratio down to a few units are accessible, which would find interest in the surface micro-structuring of materials, with perspective of further scalability to meta-material specifications.

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Section: Introductionmentioning

confidence: 99%

Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian–Bessel laser pulse

et al. 2018

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“…The mechanism of material removal during this process includes different stages: (a) melting, (b) vaporization (pyrolytic processes) and (c) chemical degradation (chemical bonds are broken which causes the degradation of machined material-photolytic process). When a high energy density laser beam is focused on workpiece surface the thermal energy is absorbed which heats and transforms the work volume into a molten, vaporized or chemically changed state that can easily be removed by flow of high pressure assist gas jet [1]. LBM is a thermal process; this means the effectiveness of this process depends on thermal properties and the optical properties (to a certain extent) rather than the mechanical properties of the machined material.…”

Section: Introductionmentioning

confidence: 99%

Laser surface texturing of tool steel: textured surfaces quality evaluation

2016

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Abstract:In this experimental investigation the laser surface texturing of tool steel of type 90MnCrV8 has been conducted. The 5-axis highly dynamic laser precision machining centre Lasertec 80 Shape equipped with the nano-second pulsed ytterbium fibre laser and CNC system Siemens 840 D was used. The planar and spherical surfaces first prepared by turning have been textured. The regular array of spherical and ellipsoidal dimples with a different dimensions and different surface density has been created. Laser surface texturing has been realized under different combinations of process parameters: pulse frequency, pulse energy and laser beam scanning speed. The morphological characterization of ablated surfaces has been performed using scanning electron microscopy (SEM) technique. The results show limited possibility of ns pulse fibre laser application to generate different surface structures for tribological modification of metallic materials. These structures were obtained by varying the processing conditions between surface ablation, to surface remelting. In all cases the areas of molten material and re-cast layers were observed on the bottom and walls of the dimples. Beside the influence of laser beam parameters on the machined surface quality during laser machining of regular hemispherical and elipsoidal dimple texture on parabolic and hemispherical surfaces has been studied.

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“…It is widely used in processing of materials [218], such as cutting, welding, marking and sintering. Besides that, it is also used in assisting the cutting of brittle materials, such as the silicon [209] and sapphire [210].…”

Section: Influence Of Brittle Materialsmentioning

confidence: 99%

Recent Advances in Micro/Nano-cutting: Effect of Tool Edge and Material Properties

Fang

2018

Nanomanuf Metrol

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Micro-and nano-machining technology has been applied in industry to generate high-precision parts with micro/nanometric accuracy or feature size in the recent decades. Cutting is one of the most powerful manufacturing processes, and the material removal mechanism is urgently demanded by the industry to understand and improve the micro/nano-machining process efficiently at a low cost. This paper presents the recent advances in cutting mechanism and its applicability for predicting the surface generation and chip formation, especially when material is removed in micro-and nanoscale. In addition to the industry-concerned performance parameters, fundamental physical parameters such as stresses, strains, temperatures, phase transformation, minimum uncut chip thickness and size effects are discussed in this paper for the indepth understanding of the micro/nano-cutting process.

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Laser Beam MicroMachining (LBMM) – A review

Cited by 227 publications

References 182 publications

Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian–Bessel laser pulse

Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian–Bessel laser pulse

Laser surface texturing of tool steel: textured surfaces quality evaluation

Recent Advances in Micro/Nano-cutting: Effect of Tool Edge and Material Properties

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