Abstract:Since the beginning of the 1990s hysteresis operators have been employed on a larger scale for the linearisation of hysteretic transducers. One reason for this is the increasing number of mechatronic applications which use solid-state actuators based on magnetostrictive or piezoelectric material or shape memory alloys. All of these actuator types show strong hysteretic effects. In addition to hysteresis, piezoelectric actuators show strong creep effects. Thus, the objective of this article is to enlarge the op… Show more
“…The proposed extended PI model in this study has a relatively simpler structure and less parameters than the compensation methods in [20], [21] , in which the creep model depends on the history of input signal and the creep effects are compensated through the whole process of PZT actuation. Therefore the hysteresis and creep compensation with the extended PI model will consume less time, which is especially meaningful for the AFM-based nanomanipulation requiring high speed actuation.…”
Section: Discussionmentioning
confidence: 99%
“…The inflexion creep can be modeled as the response of a first order linear system with a step function as input, which corresponds to the inflexion voltage [20], [21]. The magnitude of the creep depends on the inflexion voltage value.…”
Section: Mathematical Expression For the Inflexion Creep And Thementioning
confidence: 99%
“…[20], [21], in which the creep effects are described as a first order linear system. With these methods for hysteresis and creep compensation, the creep effects are considered for all the time during the whole PZT activation process and depend on the history of excitation voltage signal, which makes the computation of the inverse model difficult.…”
Abstract-The nonlinearities such as hysteresis and creep are the major factors inherent in PZT actuation that affect the tip positioning precision and manipulation performance of the AFM system. In this study, an extended PI model is generalized by introducing a creep model to the basic hysteretic operator of the PI model at the inflexion point of the hysteresis loop. Unified compensation for hysteresis and creep can be implemented with the extended PI model. Experiment results demonstrate the validity and effectiveness of the extended PI model and it is implied that the inflexion creep compensation not only improves the tip positioning precision at the inflexion points on the hysteresis loops, but also the localization effectiveness during the whole process of PZT actuation.
“…The proposed extended PI model in this study has a relatively simpler structure and less parameters than the compensation methods in [20], [21] , in which the creep model depends on the history of input signal and the creep effects are compensated through the whole process of PZT actuation. Therefore the hysteresis and creep compensation with the extended PI model will consume less time, which is especially meaningful for the AFM-based nanomanipulation requiring high speed actuation.…”
Section: Discussionmentioning
confidence: 99%
“…The inflexion creep can be modeled as the response of a first order linear system with a step function as input, which corresponds to the inflexion voltage [20], [21]. The magnitude of the creep depends on the inflexion voltage value.…”
Section: Mathematical Expression For the Inflexion Creep And Thementioning
confidence: 99%
“…[20], [21], in which the creep effects are described as a first order linear system. With these methods for hysteresis and creep compensation, the creep effects are considered for all the time during the whole PZT activation process and depend on the history of excitation voltage signal, which makes the computation of the inverse model difficult.…”
Abstract-The nonlinearities such as hysteresis and creep are the major factors inherent in PZT actuation that affect the tip positioning precision and manipulation performance of the AFM system. In this study, an extended PI model is generalized by introducing a creep model to the basic hysteretic operator of the PI model at the inflexion point of the hysteresis loop. Unified compensation for hysteresis and creep can be implemented with the extended PI model. Experiment results demonstrate the validity and effectiveness of the extended PI model and it is implied that the inflexion creep compensation not only improves the tip positioning precision at the inflexion points on the hysteresis loops, but also the localization effectiveness during the whole process of PZT actuation.
“…Krejci and Kuhnen [45] expressed the inverse analytical expression of the traditional P-I model, which reduced the tracking error by one order of magnitude. Kuhnen [46] inserted an operator dead zone into the traditional P-I model in order to describe asymmetry hysteresis nonlinearity by eliminating the influence of asymmetry on the system. Based on this controller, Shen [47] designed a new synovial controller to further improve the accuracy.…”
Section: Control Methods Based On Inverse Hysteresis Modelmentioning
The micro/nano positioning field has made great progress towards enabling the advance of micro/nano technology. Micro/nano positioning stages actuated by piezoelectric actuators are the key devices in micro/nano manipulation. The control of piezoelectric actuators has emerged as a hot topic in recent years. Piezoelectric materials have inherent hysteresis and creep nonlinearity, which can reduce the accuracy of the manipulation, even causing the instability of the whole system. Remarkable efforts have been made to compensate for the nonlinearity of piezoelectric actuation through the mathematical modelling and control approaches. This paper provides a review of recent advances on the control of piezoelectric actuators. After a brief introduction of basic components of typical piezoelectric micro/nano positioning platforms, the working principle and modelling of piezoelectric actuators are outlined in this paper. This is followed with the major control method and recent progress is presented in detail. Finally, some open issues and future work on the control of piezoelectric actuators are extensively discussed.
“…1 (a), one XYZ piezoelectric actuated nanostage (MCL Nano-Bio2M) with a maximum scan range of 50 µm × 50 µm × 50 µm and a XYZ piezotube (PI P-153.10H) with a scan range of 10 µm × 10 µm × 10 µm are used. Note that hysteresis of the piezotube are well compensated by PI operator [17,18]. The AFM cantilevers with protrudent tips (ATEC-FM), as shown in right inset of Fig.…”
Section: System Configuration Of the 3dmfmmentioning
Abstract-Applications of the conventional atomic force microscope (AFM) succeeded in manipulating nanoparticles, nanowires or nanotubes by widely used pushing or pulling operations on a single plane. However, pick-and-place nanomanipulation is still a challenge in the air. In this paper, a modified AFM, called three-dimensional (3D) manipulation force microscope (3DMFM) was developed, aiming to achieve the pick-and-place in the air. This system mainly consists of two microcantilevers and each is quipped with a nanopositioning device and an optical lever, constructing a nanotweezer with capabilities of picking and releasing nanoobjects with force sensing. Before the 3D manipulation, one of the cantilevers is employed to position nanoobjects and locate the tip of another cantilever by image scanning, then these two cantilevers fit together as a nanotweezer to grasp, transport and place the nanoobjects with real-time force sensing. In pick-andplace experiments, silicon nanowires (SiNMs) with different diameters were manipulated and 3D nanowire crosses were achieved. 3D nanomanipulation and nanoassembly in the air could become feasible through the newly developed 3DMFM.
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