A conventional atomic force microscope (AFM) has been successfully applied to manipulating nanoparticles (zero-dimensional), nanowires (one-dimensional) or nanotubes (one- or two-dimensional) by widely used pushing or pulling operations on a single surface. However, pick-and-place nanomanipulation in air is still a challenge. In this research, a modified AFM, called a three-dimensional (3D) manipulation force microscope (3DMFM), was developed to realize 3D nanomanipulation in air. This system consists of two individually actuated cantilevers with protruding tips that are facing each other, constructing a nanotweezer for the pick-and-place nanomanipulation. Before manipulation, one of the cantilevers is employed to position nano-objects and locate the tip of the other cantilever by image scanning. During the manipulation, these two cantilevers work collaboratively as a nanotweezer to grasp, transport and place the nano-objects with real-time force sensing. The manipulation capabilities of the nanotweezer were demonstrated by grabbing and manipulating silicon nanowires to build 3D nanowire crosses. 3D nanomanipulation and nanoassembly performed in air could become feasible through this newly developed 3DMFM.
In this paper, teleoperated 3D microassembly of spherical objects with haptic feedback is presented. A dualtip gripper controlled through a haptic interface is used to pick-and-place microspheres (diameter: 4 − 6µm). The proposed approach to align the gripper with the spheres is based on a userdriven exploration of the object to be manipulated. The haptic feedback is based on amplitude measurements from cantilevers in dynamic mode. That is, the operator perceives the contact while freely exploring the manipulation area. The data recorded during this exploration are processed online and generate a virtual guide to pull the user to the optimum contact point, allowing correct positioning of the dual tips. A preliminary scan is not necessary to compute the haptic feedback, which increases the intuitiveness of our system. For the pick-and-place operation, two haptic feedback schemes are proposed to either provide users with information about microscale interactions occurring during the operation, or to assist them while performing the task. As experimental validation, a two-layer pyramid composed of four microspheres is built in ambient conditions.
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