Recent Advances in the Control of Piezoelectric Actuators

Abstract

The micro/nano positioning field has made great progress towards enabling the advance of micro/nano technology. Micro/nano positioning stages actuated by piezoelectric actuators are the key devices in micro/nano manipulation. The control of piezoelectric actuators has emerged as a hot topic in recent years. Piezoelectric materials have inherent hysteresis and creep nonlinearity, which can reduce the accuracy of the manipulation, even causing the instability of the whole system. Remarkable efforts have been made to compensate for the nonlinearity of piezoelectric actuation through the mathematical modelling and control approaches. This paper provides a review of recent advances on the control of piezoelectric actuators. After a brief introduction of basic components of typical piezoelectric micro/nano positioning platforms, the working principle and modelling of piezoelectric actuators are outlined in this paper. This is followed with the major control method and recent progress is presented in detail. Finally, some open issues and future work on the control of piezoelectric actuators are extensively discussed.

Холловский Микроскоп Для Измерения Магнитных Свойств Пленок

“…При уменьшении СКО отсчетов магнитометра до 1 nT [5] предел Рао−Крамера [10] пространственного разрешения составит около 20 nm. Для того чтобы достигнуть такого разрешения, необходима система микроперемещений с погрешностью не более 20 nm, например на основе пьезоэлектрических актуаторов [11]. Большой размер актив-ной зоны преобразователя Холла существенно не повлиял на ре-зультат определения пространственного положения измеряемого ди-поля, следовательно, для данной задачи использование микродатчи-ков с меньшей чувствительностью и большими тепловыми шумами нецелесообразно.…”

First-principles soft-mode lattice dynamics of PbZr0.5Ti0.5O3 and shortcomings of the virtual crystal approximation

“…This is due to its giant electromechanical response and well developed, low cost synthesis 1,2 . Together, this has ensured the technological relevance of the material; well adapted for exploitation in ultrasonic transducers 3,4 , ceramic capacitors and actuators 5 . More exotically, PZT has been proposed for use in potential piezoelectricity-induced room temperature superconductors where a supercurrent is induced along a metal/piezoelectric interface 6,7 .…”

Recent advances in nanorobotic manipulation inside scanning electron microscopes

“…Piezoelectric actuators inherently exhibit nonlinear characteristics of hysteresis and creep 49 , which degrade positioning precision and can cause system instability 61 . Three types of position sensors exist for integration with piezoelectric actuators, including capacitive, optical encoder-based and strain gauge-based sensors.…”

“…However, the accuracy of feedforward techniques is dependent on both the model and the parameters identified in the model, which can change over time, especially in dynamic scenarios and the vacuum environment inside an SEM 122 . Feedback control utilizes sensor feedback, relaxes modeling requirements, and achieves better performance in terms of accuracy, vibration suppression, and uncertainty/disturbance rejection 61 . However, feedback-controlled nanopositioning has low bandwidth and requires sensor integration in the hardware platform.…”

“…The low-level controller can be implemented via feedback, feedforward, or feedback-feedforward control 61,118,119 . A feedforward controller determines control signals according to the knowledge and modes of hysteresis, creep, and vibration.…”