Integrating Poly-Silicon and InGaZnO Thin-Film Transistors for CMOS Inverters

Characterization of high mobility inverted coplanar Zinc Nitride Thin-film Transistors

“…The development of high mobility thin-film transistors (TFTs) is a highly demanded research topic, in order to meet the requirements for advanced applications such as driving circuits, nonvolatile memory devices and flexible integrated circuits [1,2]. Inorganic oxide semiconductors such as zinc oxide (ZnO) or Indium-Gallium Zinc Oxide (IGZO) are considered an important alternative to the mature amorphous silicon TFT technology mainly to their high performance and low temperature deposition [1,2]. However, the research of new materials with higher electron mobilities to be considered for TFTs applications is under development.…”

Low‐Temperature Polysilicon Oxide Thin‐Film Transistors with Coplanar Structure Using Six Photomask Steps Demonstrating High Inverter Gain of 264 V V−1

“…For the a‐IGZO TFT, the LT‐GI provides an excellent performance. LTPO TFT backplanes are used in displays with a coplanar LTPS and ES or BCE a‐IGZO TFTs. We choose the coplanar structure for both LTPS and a‐IGZO TFTs for the LTPO CMOS circuits to reduce parasitic capacitance …”

“…On the contrary, LTPS backplane is used for commercial LCD and OLED displays of smartphones . Recently, low‐temperature polysilicon oxide (LTPO) is of increasing interest for the use of high mobility p‐channel LTPS TFT and very low off‐current a‐IGZO TFT . The combination of these two devices with the simplified process is key for its application to displays.…”

“…LTPO TFTs with an etch stopper (ES) or back‐channel etched (BCE) a‐IGZO TFT with coplanar LTPS TFT are used for CMOS circuits . Apple used coplanar a‐IGZO TFT and coplanar LTPS TFT for LTPO array, but the a‐IGZO TFT process starts after the whole process of LTPS TFT.…”

High refresh rate and low power consumption AMOLED panel using top‐gate n‐oxide and p‐LTPS TFTs

“…Beside, using oxide and LTPS transistors in panel circuits for low power consumption display has been reported 6–12 . In this paper, we have proposed high refresh rate and low power consumption OLED panel, by simultaneously utilizing both p‐LTPS and n‐type indium–gallium–zinc–oxide (n‐IGZO).…”