2010
DOI: 10.1109/tadvp.2009.2035999
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Integrated Microfluidic Cooling and Interconnects for 2D and 3D Chips

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Cited by 107 publications
(64 citation statements)
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“…Single-phase cooling refers to the heat removal by a coolant that remains in liquid state and rises in temperature inside the heat sink (sensible heat absorption). Several prototype 2D and 3D ICs have been built to demonstrate that single-phase liquid cooling has superior cooling capabilities compared to air cooling [3,4].…”
Section: Introductionmentioning
confidence: 99%
“…Single-phase cooling refers to the heat removal by a coolant that remains in liquid state and rises in temperature inside the heat sink (sensible heat absorption). Several prototype 2D and 3D ICs have been built to demonstrate that single-phase liquid cooling has superior cooling capabilities compared to air cooling [3,4].…”
Section: Introductionmentioning
confidence: 99%
“…Prototypes of 3-D chips with interlayer microchannel heat sinks have been shown to handle up to 250 W/cm 2 of hot spot heat fluxes, demonstrating the scalability of interlayer liquid cooling [8], [9]. Enhanced heat transfer geometries, such as pin fins, have also been built as an alternative to microchannels, improving the heat transfer characteristics at the cost of higher unpredictability in coolant flow patterns [7], [21].…”
Section: A Liquid Cooling Utilization In 3-d Icsmentioning
confidence: 99%
“…1) is a viable and scalable cooling solution for 3-D MPSoCs. Prototypes of 3-D interlayer waterbased liquid-cooled packages have demonstrated the superior cooling capabilities of this technology, the corresponding reduction in the cooling energy, and also the relative ease with which the current CMOS processes can be modified for manufacturing liquid-cooled systems [7]- [9].…”
mentioning
confidence: 99%
“…Hence, it is touted as a long-term green energy solution for next-generation datacenters [6]. Prototypes of 2-D and 3-D stacked ICs with microchannel liquid cooling have been built by various research groups around the world with promising results [3], [7], [8]. An example from IBM is shown in Fig.…”
mentioning
confidence: 99%