2011
DOI: 10.7567/jjap.50.04dk09
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Influences of Intensity of Electric Field on Properties of Poly(vinylidene fluoride–tetrafluoroethylene) Thin Films during Annealing Process

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Cited by 5 publications
(1 citation statement)
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“…On the other hand, organic ferroelectric polar polymers have been explored as an alternative to inorganic ferroelectrics requiring high process temperature, because ferroelectric polymers can be deposited on Si at temperatures as low as 200 °C by the solution process. Since poly(vinylidene fluoride) (PVDF) and its copolymers with trifluoroethylene [P(VDF-TrFE)] and tetrafluoroethylene [P(VDF-TeFE)] are well-known ferroelectric polymers, [8][9][10][11][12][13][14] many studies on the MFIS and MFS structures using these organic ferroelectrics have been reported. [15][16][17][18][19][20][21][22][23][24][25][26][27][28][29] In the case of Si-based MFS structures with organic ferroelectrics, MFIS structures with an inserted insulator layer such as Ta 2 O 5 , SiON x , or Si 3 N 4 are usually used because it is difficult to obtain smooth thin organic films directly on hydrogen-terminated Si surfaces.…”
Section: Introductionmentioning
confidence: 99%
“…On the other hand, organic ferroelectric polar polymers have been explored as an alternative to inorganic ferroelectrics requiring high process temperature, because ferroelectric polymers can be deposited on Si at temperatures as low as 200 °C by the solution process. Since poly(vinylidene fluoride) (PVDF) and its copolymers with trifluoroethylene [P(VDF-TrFE)] and tetrafluoroethylene [P(VDF-TeFE)] are well-known ferroelectric polymers, [8][9][10][11][12][13][14] many studies on the MFIS and MFS structures using these organic ferroelectrics have been reported. [15][16][17][18][19][20][21][22][23][24][25][26][27][28][29] In the case of Si-based MFS structures with organic ferroelectrics, MFIS structures with an inserted insulator layer such as Ta 2 O 5 , SiON x , or Si 3 N 4 are usually used because it is difficult to obtain smooth thin organic films directly on hydrogen-terminated Si surfaces.…”
Section: Introductionmentioning
confidence: 99%