Influence of focusing depth on the microfabrication of waveguides inside silica glass by femtosecond laser direct writing

Liu, D.; Li, Y.; An, Rong; Dou, Yusheng; Yang, Hong; Gong, Qihuang

doi:10.1007/s00339-006-3610-4

Cited by 28 publications

(14 citation statements)

References 20 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This would aid quality control during fabrication, allowing monitoring to ensure uniformity of the waveguides throughout the chip. This is particularly important when manufacturing three dimensional photonic circuits as depth dependent aberrations can affect the focal intensity distribution of the fabrication beam [20][21][22]. It would also enable online adjustment of the fabrication procedure to ensure that the waveguide network may display cer- tain desired properties.…”

Section: Live Acquisition Of Phase Profiles During Fabricationmentioning

confidence: 99%

Refractive index profiling of direct laser written waveguides: tomographic phase imaging

Jesacher¹,

Salter²,

Booth³

2013

Opt. Mater. Express

View full text Add to dashboard Cite

We present a technique to measure the refractive index profile of direct laser written waveguides. This method has the potential for straightforward implementation in an existing laser fabrication system. Quantitative phase microscopy, based on the Transfer of Intensity equation, is used to analyse waveguides fabricated with an ultrashort pulsed laser embedded several hundred micron below the surface of fused silica. It is shown that the cumulative phase change induced by the waveguide perpendicular to its axis may be monitored in real-time during the fabrication process. Results are verified through comparison with interferometry. Tomographic measurements using illumination from a high numerical aperture condenser lens are used to infer the waveguide cross-section. Results are compared with measurements of the waveguide cross-section from a third harmonic generation microscope.

show abstract

Section: Live Acquisition Of Phase Profiles During Fabricationmentioning

confidence: 99%

Refractive index profiling of direct laser written waveguides: tomographic phase imaging

Jesacher¹,

Salter²,

Booth³

2013

Opt. Mater. Express

View full text Add to dashboard Cite

show abstract

“…Marcinkevicius et al [15] reported that the spherical aberrations increased the size and distorted the shape of the photo-damaged region. Liu et al [16] experimentally studied the influence of the focusing depth on both the index change threshold and damage threshold as well as on the cross section of the fabricated waveguides under irradiation of 1-kHz femtosecond laser pulses.…”

Section: Channel Formation and Focusing Effectmentioning

confidence: 99%

“…By paraxial approximation and using the Snell's law on the interface, n 2 sin 2 = n 1 sin 1 = NA is satisfied, and the longitudinal aberration range, l pa , due to spherical aberration, which is the distance from the paraxial-ray focal plane to the peripheral-ray focal plane can be written as [16,17] …”

Section: Channel Formation and Focusing Effectmentioning

confidence: 99%

Single step channeling in glass interior by femtosecond laser

Kongsuwan

Wang

Yao

2012

Journal of Applied Physics

View full text Add to dashboard Cite

Channeling inside a transparent material, glass, by femtosecond laser was performed by using a single step process rather than hybrid processes that combine the laser irradiation with an additional tool or step to remove the material. Tightly focusing of a single femtosecond laser pulse using proper optical and laser processing parameters could induce the microexplosion and could create voids inside transparent materials, and the effects of these parameters on the resultant feature geometry and channel length were studied. Understanding of the channel length variation at different locations from the specimen surface could enhance prediction capability. Taking into account of the laser, material, and lens properties, numerical models were developed to predict the absorption volume shape and size at different focusing depths below the surface of a specimen. These models will also be validated with the variation in feature and channel lengths inside the specimen obtained from the experiments. Spacing between adjacent laser pulses and laser parameters were varied to investigate effects of channel overlapping and its influence on long channel formation.

show abstract

“…When the sample is moved with respect to the laser beam a refractive index profile like in a buried waveguide can be produced. A variety of devices in glasses such as waveguides [1][2][3][4][5], couplers [6][7][8][9], gratings [10], and binary storages [11][12][13][14] have been demonstrated. The fabrication of photonic devices is based on nonlinear absorption around the focal volume of femtosecond laser pulses.…”

Section: Introductionmentioning

confidence: 99%

Beam coupling in 2×2waveguide arrays in fused silica fabricated by femtosecond laser pulses

Chen

Xia

et al. 2007

Opt. Express

View full text Add to dashboard Cite

show abstract

Influence of focusing depth on the microfabrication of waveguides inside silica glass by femtosecond laser direct writing

Cited by 28 publications

References 20 publications

Refractive index profiling of direct laser written waveguides: tomographic phase imaging

Refractive index profiling of direct laser written waveguides: tomographic phase imaging

Single step channeling in glass interior by femtosecond laser

Beam coupling in 2×2waveguide arrays in fused silica fabricated by femtosecond laser pulses

Contact Info

Product

Resources

About