In situ site-specific specimen preparation for atom probe tomography

Thompson, Keith; Lawrence, D.; Larson, D.J.; Olson, Justin; Kelly, Tom; Gorman, Brian P.

doi:10.1016/j.ultramic.2006.06.008

Cited by 1,486 publications

(818 citation statements)

References 20 publications

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“…1a. 20,21 A series of APT specimens were prepared from locations highlighted in blue following the conventional procedure outlined by Thompson et al 22 and using a commercially available flat-top Si coupon and conventional clip holder. A representative tomographic reconstruction is shown in Fig.…”

Section: Methods (1) Cecci-guided Conventional Target Preparationmentioning

confidence: 99%

Correlative Microscopy—Novel Methods and Their Applications to Explore 3D Chemistry and Structure of Nanoscale Lattice Defects: A Case Study in Superalloys

Makineni

Lenz

Kontis

et al. 2018

JOM

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Section: Methods (1) Cecci-guided Conventional Target Preparationmentioning

confidence: 99%

Correlative Microscopy—Novel Methods and Their Applications to Explore 3D Chemistry and Structure of Nanoscale Lattice Defects: A Case Study in Superalloys

Makineni

Lenz

Kontis

et al. 2018

JOM

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“…To protect the device structure from Ga damage during FIB processing, the wafer surface was coated with 200 nm of poly-Si. A siteselective in-situ liftout technique similar to that performed by Miller et al [4] and Thompson et al [5] was then used to prepare AP tips from the patterned region of the wafer. First, a 200 nm in-situ Pt deposition was performed directly over a channel feature to provide additional protection during FIB processing.…”

Section: Methodsmentioning

confidence: 99%

3-D analysis of semiconductor dopant distributions in a patterned structure using LEAP

et al. 2008

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“…The APT samples were prepared by the in--situ site--specific lift--out method [19] using focused ion beam (FIB) milling on a Zeiss Auriga instrument. The Mo TEM grid (Ted Pella) used as the substrate to hold the lift--out samples.…”

Section: Atom Probe Tomographymentioning

confidence: 99%

Elemental distributions within multiphase quaternary Pb chalcogenide thermoelectric materials determined through three-dimensional atom probe tomography

Yamini

Mitchell

et al. 2016

Nano Energy

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Nanostructured multiphase p-type lead chalcogenides have shown the highest efficiencies amongst thermoelectric materials. However, their electronic transport properties have been described assuming homogenous distribution of dopants between phases. Here, we have analyzed elemental distributions in precipitates and matrices of nanostructured multiphase quaternary Pb chalcogenides doped to levels below and above the solubility limit of the matrix, using three-dimensional atom probe tomography. We demonstrate that partitioning of sodium and selenium occur between the matrix and secondary phase in both lightly-and heavily-doped compounds and that the concentrations of sodium and selenium in precipitates are higher than those in the matrices. This can contribute to the transport properties of such multiphase compounds The sodium concentration reached ~3 at% in sulfur-rich (PbS) precipitates and no nano precipitates of Na-rich phases were observed within either phase, a result that is supported by high resolution TEM analysis, indicating that the solubility limit of sodium in PbS is much higher than previously thought. However, non-equilibrium segregation of sodium is identified at the precipitates/matrix interfaces. These findings can lead to further advances in designing and characterizing multiphase thermoelectric materials. AbstractNanostructured multiphase p--type lead chalcogenides have shown the highest efficiencies amongst thermoelectric materials. However, their electronic transport properties have been described assuming homogenous distribution of dopants between phases. Here, we have analyzed elemental distributions in precipitates and matrices of nanostructured multiphase quaternary Pb chalcogenides doped to levels below and above the solubility limit of the matrix, using three--dimensional atom probe tomography. We demonstrate that partitioning of sodium and selenium occur between the matrix and secondary phase in both lightly-- and heavily--doped compounds and that the concentrations of sodium and selenium in precipitates are higher than those in the matrices. This can contribute to the transport properties of such multiphase compounds The sodium concentration reached ~3 at.% in sulfur--rich (PbS) precipitates and no nano precipitates of Na--rich phases were observed within either phase, a result that is supported by high resolution TEM analysis, indicating that the solubility limit of sodium in PbS is much higher than previously thought. However, non--equilibrium segregation of sodium is identified at the precipitates/matrix interfaces. These findings can lead to further advances in designing and characterizing multiphase thermoelectric materials.

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In situ site-specific specimen preparation for atom probe tomography

Cited by 1,486 publications

References 20 publications

Correlative Microscopy—Novel Methods and Their Applications to Explore 3D Chemistry and Structure of Nanoscale Lattice Defects: A Case Study in Superalloys

Correlative Microscopy—Novel Methods and Their Applications to Explore 3D Chemistry and Structure of Nanoscale Lattice Defects: A Case Study in Superalloys

3-D analysis of semiconductor dopant distributions in a patterned structure using LEAP

Elemental distributions within multiphase quaternary Pb chalcogenide thermoelectric materials determined through three-dimensional atom probe tomography

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