In situ EELS observation of diamond during hydrogen-ion bombardment

Kushita, Kouhei N.; Hojou, K.; Furuno, S.; Otsu, Hiroshi

doi:10.1016/s0022-3115(09)80063-9

Cited by 5 publications

(7 citation statements)

References 8 publications

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“…By comparing double-ion (Hi and He+) bombardments with single-ion (H+2) bombardments, the former case was more effective on the amorphization of B4C than the latter when the ion energies provided the same effective penetration depth. The plasmon-loss peak energy (25.2 eV) for virgin B4C is lower than that (27.4 eV) of graphite, as seen in Figure 8, and much lower than that (35.6 eV) of diamond [9], which indicates that the valence-electron density of B4C is lower than those of graphite and diamond.…”

Section: Introductionmentioning

confidence: 82%

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In Situ EELS and TEM Observation of Boron Carbide (B₄C) During Hydrogen- and Helium-Ion Bombardments

Kushita

Hojou

Furuno

1995

Microsc. Microanal. Microstruct.

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Abstract. 2014 Increasing attention has been paid recently to boron carbide (B4C) from a viewpoint of plasma-facing materials in a fusion device. This paper reports structural change of B4C observed in situ by EELS and TEM during hydrogen-and helium-ion bombardments at room temperature. The B4C became amorphous by the ion bombardments. This amorphization process was presented as a function of the shift of plasmon-loss peak energy and the change of core-loss profiles in addition to electron diffraction patterns. Analysis of core-loss peaks for boron as well as for carbon in B4C during amorphization process revealed the formation of sp2 type bonding between constituent carbon atoms by the ion bombardments.

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Section: Introductionmentioning

confidence: 82%

“…Previously, we have carried out EELS studies on ion-bombarded graphite and diamond [8][9][10], in which EELS technique was found highly valid to study the change of chemical structure of the ion-bombarded materials. This paper reports the results of in situ EELS and TEM observations of B4C during hydrogenand helium-ion bombardments.…”

Section: Introductionmentioning

confidence: 99%

In Situ EELS and TEM Observation of Boron Carbide (B₄C) During Hydrogen- and Helium-Ion Bombardments

Kushita

Hojou

Furuno

1995

Microsc. Microanal. Microstruct.

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“…31-33 Area 2's spectrum is similar while the plasmon in area 1 shifts downwards in energy, an effect that has previously been attributed to damage 32 and reflects a reduction in valence electron density. 34 Amorphous carbon, carbon onions, fullerenes, and graphite are all known to have bulk plasmons at lower energies (around 24, 24.5, 26, and 27 eV, respectively 35 ) and it would be difficult to decompose the spectrum here into distinct components.…”

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confidence: 79%

High resolution structural characterisation of laser-induced defect clusters inside diamond

Salter

Booth

Courvoisier

et al. 2017

Applied Physics Letters

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Laser writing with ultrashort pulses provides a potential route for the manufacture of three-dimensional wires, waveguides, and defects within diamond. We present a transmission electron microscopy study of the intrinsic structure of the laser modifications and reveal a complex distribution of defects. Electron energy loss spectroscopy indicates that the majority of the irradiated region remains as sp3 bonded diamond. Electrically conductive paths are attributed to the formation of multiple nano-scale, sp2-bonded graphitic wires and a network of strain-relieving micro-cracks.

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“…In situ EELS has been a useful tool in the investigation of time-dependant dynamic processes in a variety of cases ranging from ion and electron irradiation damage (Kushita et al, 1992; Trasobares et al, 2002; Mkhoyan et al, 2006) to chemical kinetics of catalysis (Crozier, 2006). Although the time-dependant data from the e-beam hole-drilling of alumina and silicon oxide have already been presented (Berger et al, 1987; Chen et al, 1998), there have been few detailed discussions of the actual in situ EELS technique as it applies to e-beam nanofabrication.…”

Section: Introductionmentioning

confidence: 99%

“…In situ EELS has been a useful tool in the investigation of time-dependant dynamic processes in a variety of cases ranging from ion and electron irradiation damage~Kushita et al., 1992;Trasobares et al, 2002;Mkhoyan et al, 2006! to chemical kinetics of catalysis~Crozier, 2006!.…”

Section: Introductionmentioning

confidence: 99%

The Applications ofIn SituElectron Energy Loss Spectroscopy to the Study of Electron Beam Nanofabrication

et al. 2009

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An in situ electron energy loss spectroscopy (EELS) technique has been developed to investigate the dynamic processes associated with electron-beam nanofabrication on thin membranes. In this article, practical applications germane to e-beam nanofabrication are illustrated with a case study of the drilling of nanometer-sized pores in silicon nitride membranes. This technique involves successive acquisitions of the plasmon-loss and the core-level ionization-loss spectra in real time, both of which provide the information regarding the hole-drilling kinetics, including two respective rates for total mass loss, individual nitrogen and silicon element depletion, and the change of the atomic bonding environment. In addition, the in situ EELS also provides an alternative method for endpoint detection with a potentially higher time resolution than by imaging. On the basis of the time evolution of in situ EELS spectra, a qualitative working model combining knock-on sputtering, irradiation-induced mass transport, and phase separation can be proposed.

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In situ EELS observation of diamond during hydrogen-ion bombardment

Cited by 5 publications

References 8 publications

In Situ EELS and TEM Observation of Boron Carbide (B₄C) During Hydrogen- and Helium-Ion Bombardments

In Situ EELS and TEM Observation of Boron Carbide (B₄C) During Hydrogen- and Helium-Ion Bombardments

High resolution structural characterisation of laser-induced defect clusters inside diamond

The Applications ofIn SituElectron Energy Loss Spectroscopy to the Study of Electron Beam Nanofabrication

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In situ EELS observation of diamond during hydrogen-ion bombardment

Cited by 5 publications

References 8 publications

In Situ EELS and TEM Observation of Boron Carbide (B4C) During Hydrogen- and Helium-Ion Bombardments

In Situ EELS and TEM Observation of Boron Carbide (B4C) During Hydrogen- and Helium-Ion Bombardments

High resolution structural characterisation of laser-induced defect clusters inside diamond

The Applications ofIn SituElectron Energy Loss Spectroscopy to the Study of Electron Beam Nanofabrication

Contact Info

Product

Resources

About

In Situ EELS and TEM Observation of Boron Carbide (B₄C) During Hydrogen- and Helium-Ion Bombardments

In Situ EELS and TEM Observation of Boron Carbide (B₄C) During Hydrogen- and Helium-Ion Bombardments