Improved contact resistance uniformity, with a low resistance on high-low doped GaAs MESFET, was demonstrated using a Pd/Ge/Ti/Au ohmic contact. The lowest contact resistivity obtained was 2:8 2 2 2 10 0 0 06 -cm 2 . The average value and standard deviation (1Rc Rc Rc) of the contact resistance (Rc Rc Rc) were 0:73 and 0:07 -mm, respectively, which were more uniform than those for AuGe/Ni contacts with an average Rc Rc Rc of 0:77mm and 1Rc Rc Rc of 0:16 -mm. The improved uniformity was attributed to the uniform penetration of the ohmic junction into the buried high-doped channel layer by solid-state reactions, resulting in the improved uniformity of device performance.