<i>An Introduction to Vacuum Technique</i>

Turnbull, A.H.; Barton, R. S.; Riviére, J.C.; Pasternak, R.

doi:10.1063/1.3051479

Cited by 5 publications

(1 citation statement)

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“…Conventional thermal pressure gauges utilize the pressure dependence of gas thermal conductivity to detect pressure changes when pressure is below a certain limit [4]. Sensor generally consists of a hot electrical wire.…”

Section: Working Principle Of the Sensormentioning

confidence: 99%

SAW pressure sensor for vacuum control applications

Nicolay

Elmazria

Sarry

et al. 2009

2009 IEEE International Frequency Control Symposium Joint With the 22nd European Frequency and Time Forum

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A new kind of surface acoustic wave (SAW) sensor has been developed in order to measure sub-atmospheric pressure below 100 mTorr with accuracy better than 0.1 mTorr. It provides an efficient measuring solution in a pressure range inaccessible in past by conventional diaphragm-based SAW sensors. Indeed, due to the small bending force in low pressure and limited sensitivity, diaphragm-based SAW sensors are only suited to monitor relatively high pressure with a precision hardly better than 0.5 Torr. In order to reach precision level better than 1 mTorr at sub-atmospheric pressure for vacuum technology applications, a radically different SAW-based solution is desired. Our device aims to measure sub-atmospheric pressure less than 100 mTorr with a threshold resolution better than 0.1 mTorr. The concept is similar to the one used by Pirani pressure gauges. However, it is claimed that a heated and suspended SAW device may have better sensitivity. A theoretical model based on the basic concepts of gas kinetic theory and thermodynamics is presented. The validity of the model is checked by comparison between theoretical and experimental results.

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Section: Working Principle Of the Sensormentioning

confidence: 99%