Low-Cost Surface Micromachined Pirani Pressure Sensor with Atmospheric Pressure Range

Khosraviani, Kourosh; Ma, Yuan; Leung, Albert M.

doi:10.1109/ccece.2007.45

Cited by 1 publication

(1 citation statement)

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“…Laser-induced heating is applied to expand the dynamic vacuum pressure range thus that the lower limit of vacuum pressure measurement is as low as 10 −6 Torr (1.33 × 10 −4 Pa) [12]. For beyond atmospheric pressure, micro-Pirani vacuum sensors have also been exploited, and some of these show good sensitivity to vacuum pressure up to 7 × 10 5 Pa [13,14]. Apart from a larger dynamic vacuum pressure range, smaller micro-Pirani vacuum sensor size is also an important parameter.…”

Section: Introductionmentioning

confidence: 99%

Highly Sensitive Diode-Based Micro-Pirani Vacuum Sensor with Low Power Consumption

Wei

Liu

et al. 2019

Sensors

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Micro-Pirani vacuum sensors usually operate at hundreds of microwatts, which limits their application in battery-powered sensor systems. This paper reports a diode-based, low power consumption micro-Pirani vacuum sensor that has high sensitivity. Optimizations to the micro-Pirani vacuum sensor were made regarding two aspects. On the one hand, a greater temperature coefficient was obtained without increasing power consumption by taking advantage of series diodes; on the other hand, the sensor structure and geometries were redesigned to enlarge temperature variation. After that, the sensor was fabricated and tested. Test results indicated that the dynamic vacuum pressure range of the sensor was from 10−1 to 104 Pa when the forward bias current was as low as 10 μA with a power consumption of 50 μW. Average sensitivity was up to 90 μV/Pa and the sensitivity of unit power consumption increased to 1.8 V/W/Pa. In addition, the sensor could also work at a greater forward bias current for better sensor performance.

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Section: Introductionmentioning

confidence: 99%