Hybrid 3D Shape Measurement Using the MEMS Scanning Micromirror

Abstract

A surface with large reflection variations represents one of the biggest challenges for optical 3D shape measurement. In this work, we propose an alternative hybrid 3D shape measurement approach, which combines the high accuracy of fringe projection profilometry (FPP) with the robustness of laser stripe scanning (LSS). To integrate these two technologies into one system, first, we developed a biaxial Microelectromechanical Systems (MEMS) scanning micromirror projection system. In this system, a shaped laser beam serves as a light source. The MEMS micromirror projects the laser beam onto the object surface. Different patterns are produced by controlling the laser source and micromirror jointly. Second, a quality wised algorithm is delivered to develop a hybrid measurement scheme. FPP is applied to obtain the main 3D information. Then, LSS helps to reconstruct the missing depth guided by the quality map. After this, the data fusion algorithm is used to merge and output complete measurement results. Finally, our experiments show significant improvement in the accuracy and robustness of measuring a surface with large reflection variations. In the experimental instance, the accuracy of the proposed method is improved by 0.0278 mm and the integrity is improved by 83.55%.

A novel spatial phase-unwrapping method based on single-pixel binarized line pattern for real-time 3D measurement

“…Furthermore, the small window is adaptive for each deformed light line, which can effectively avoid the loss of details. Unlike the conventional scan-line algorithms [32,33], the proposed method does not require a multi-projector and laser scanning process. Meanwhile, the wrapped phase can be unwrapped point to point with only one additional SPB line pattern, which can overcome the propagation of errors.…”

Editorial for the Special Issue on Optical MEMS

“…This special issue contains twelve research papers covering MEMS mirrors [1,2,3,4,5,6,7,8,9,10], MEMS variable optical attenuators (VOAs) [11], and tunable spectral filters [12]. These MEMS devices are based on three of the commonly used actuation mechanisms: electrothermal [1], electrostatic [2,3,4,5,6,7,11], and electromagnetic actuation [8,9,10]. MEMS optical scanners involving single mirrors are demonstrated or used in [1,2,3,8,9,10], while all other optical microsystems employ MEMS mirror arrays that are all based on DMDs [4,5,6,7].…”

“…These MEMS devices are based on three of the commonly used actuation mechanisms: electrothermal [1], electrostatic [2,3,4,5,6,7,11], and electromagnetic actuation [8,9,10]. MEMS optical scanners involving single mirrors are demonstrated or used in [1,2,3,8,9,10], while all other optical microsystems employ MEMS mirror arrays that are all based on DMDs [4,5,6,7]. This special issue also includes one review paper on metalens-based miniaturized optical systems [13].…”

“…Among the papers on single MEMS mirrors, two are focused on MEMS device fabrication [1,10], one on optimization of the driving signals [3], one on applying MEMS mirrors for confocal microscopy [2], and two on using MEMS mirrors to generate structural light patterns for 3D measurement [8,9]. Interestingly, there are several papers reporting various applications of DMDs, including spectral filtering [4], Hadamard spectroscopy [5], wavefront/aberration correction [6], and a tunable fiber laser [7].…”

“…Yang at al. combined the high accuracy of the fringe projection profilometry with the robustness of the laser stripe scanning and demonstrated 3D shape measurement of surfaces with large reflection variations using a biaxial scanning micromirror projection system [9].…”