Editorial for the Special Issue on Optical MEMS

Xie, Huikai; Zamkotsian, Frédéric

doi:10.3390/mi10070458

Cited by 3 publications

(6 citation statements)

References 13 publications

(46 reference statements)

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“…In this paper, two inductor-based driving circuits are ex Through the results of this study, key findings are summarized as (1) The proposed quasi-square wave inductor-based driving c stored in the piezoelectric patches without using the driving chip o ing circuit, which improves the efficiency and reduces the cost.…”

Section: Discussionmentioning

confidence: 99%

“…Equation (1) indicates the effect of the PZT on the structure of the PE fan. The resonant frequency of the fan is given as…”

Section: Structure and Modellingmentioning

confidence: 99%

“…where eq m , eq c , and eq k are equivalent mass, damping, and the stiffness of the fan, X is the displacement of the free end of the beam, and V is the voltage applied to the PZT. Equation (1) indicates the effect of the PZT on the structure of the PE fan. The resonant frequency of the fan is given as…”

Section: Structure and Modellingmentioning

confidence: 99%

“…Electronic products are getting compact and powerful with the development of manufacturing technology [1]. Thus, thermal management has become a key issue in avoiding inefficiency or damage to critical equipment.…”

Section: Introductionmentioning

confidence: 99%

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Design and Experimental Analysis of Charge Recovery for Piezoelectric Fan

Zhen-wei

Wei

et al. 2022

Actuators

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The piezoelectric (PE) fan is widely adopted in the field of microelectronics cooling due to its advantages of high reliability and good heat dissipation characteristics. However, PE fans driven by conventional circuits suffer from plenty of energy loss. To save energy, we propose an inductor-based charge recovery method and apply it to the driving circuit for the PE fan. Two inductor-based driving circuits, a single inductor-based driving (SID) circuit and a double inductor-based driving (DID) circuit are compared. The SID circuit has a simple structure and a slightly higher energy-saving rate, while the DID circuit introduces no additional oscillations and is more stable. The experimental results show that when the supply voltage changes, both circuits have a relatively stable energy-saving rate, which is about 30% for the SID circuit and 28% for the DID circuit. Moreover, the proposed circuits enjoy the same driving capacity as the conventional circuit, and the driven fan has the same cooling performance.

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Section: Discussionmentioning

confidence: 99%

“…Equation (1) indicates the effect of the PZT on the structure of the PE fan. The resonant frequency of the fan is given as…”

Section: Structure and Modellingmentioning

confidence: 99%

Section: Structure and Modellingmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Design and Experimental Analysis of Charge Recovery for Piezoelectric Fan

Zhen-wei

Wei

et al. 2022

Actuators

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“…When light is irradiated onto an object in this manner, force is generated on the surface of the reflected object. This phenomenon is used to develop a new technology to reduce the friction between the contacting surfaces of MEMSs and achieve an optical MEMS [ 27 , 28 , 29 ].…”

Section: Principlementioning

confidence: 99%

Feasibility of Optical Bearing Fabrication Using Radiation Pressure

2022

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A three-dimensional (3D) printer was used to create a model device to discuss the reduction in friction generated by rotation and investigate the possibility of friction reduction in microelectromechanical systems (MEMSs) using light as a future technology. Experiments on this model showed that friction could be reduced using the light radiation pressure. In addition, the possibility of reducing the effect of the friction generated during rotation was demonstrated by adding a mechanism to the rotating rotor mechanism that reduces friction based on the radiation pressure. The effectiveness and associated problems of 3D printers as a fabrication technology for MEMSs were explored.

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Development of the high angular resolution 360° LiDAR based on scanning MEMS mirror

Yang

Liu

Chen

et al. 2023

Sci Rep

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Light detection and ranging (LiDAR) using various operational principles has been applied in many fields, e.g., robotics navigation, autonomous vehicles, unmanned aerial flyers, land surveying, etc. The multichannel LiDAR system is of great importance in the field of autonomous driving due to its larger field of view (FoV). However, the number of transceivers limits the vertical angular resolution of multichannel LiDAR systems and makes them costly. On the other hand, the emergence of microelectromechanical systems (MEMS) mirrors may provide a highly promising solution to a low-cost, high angular resolution LiDAR system. We have demonstrated a MEMS mirror-based 360° LiDAR system with high angular resolution and will present the detailed design process and obtained experimental results in this paper. With the combination of the MEMS mirror and a rotation platform for the LiDAR system, a 360° × 8.6° (horizontal × vertical) FoV was achieved. Compared with existing commercial multichannel 360° LiDAR systems, our system has 13.8 times better angular resolution than the Velodyne HDL-64 LiDAR sensor. The experimental results verified an excellent performance of 0.07° × 0.027° (horizontal × vertical) angular resolution, which enhances the panoramic scanning and imaging capability of the LiDAR system, potentially providing more accurate 3D scanning applications in areas such as autonomous vehicles, indoor surveying, indoor robotics navigation, etc.

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Editorial for the Special Issue on Optical MEMS

Abstract: Optical micro-electro-mechanical systems (MEMS), micro-opto-electro-mechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micron or millimeter scale [...]

Cited by 3 publications

References 13 publications

Design and Experimental Analysis of Charge Recovery for Piezoelectric Fan

Design and Experimental Analysis of Charge Recovery for Piezoelectric Fan

Feasibility of Optical Bearing Fabrication Using Radiation Pressure

Development of the high angular resolution 360° LiDAR based on scanning MEMS mirror

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