Highly sensitive photoacoustic gas sensor based on multiple reflections on the cell wall

Ke, Changjian; Zhang, Bo; Liu, Shuai; Jin, Feng; Guo, Min; Chen, Yewei; Yu, Qingxu

doi:10.1016/j.sna.2019.03.014

Cited by 42 publications

(25 citation statements)

References 30 publications

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“…Among various configurations, sensors based on dome-like gas cells [44,47,50,59], allow for planar integration of emitters and detectors, and could be used to further reduce their size. The main challenge is the relatively small pathlengths, l , which can be addressed by further device optimization, e.g., based on multi-pass designs [57,74,111], or use of photonic crystals [55,112] or optical cavities [56] for enhanced absorption. More recently, photoacoustic gas sensors, based on low-cost commercially available MEMS microphones have emerged as simple, compact, and highly reliable devices [15,50].…”

Section: Discussionmentioning

confidence: 99%

“…Various topologies have been implemented to fabricate optical gas sensors (Figure 3), with the most commonly used based on gas cells formed between face-to-face configured emitters and optical detectors [48,53,54] (Figure 3a–c,e). Strategies to miniaturize the gas cell include: the use of enhancement layers, such as photonic crystals [55], optical cavities [56], multi-pass cells [57], or gas enrichment layers [58], to increase the light-gas interaction (Figure 3c); planar configurations of emitters and detectors [44,59] (Figure 3f); or use of waveguides for evanescent-field interaction [60,61,62] (Figure 3g). The absorbed light, ∼I(λ), is typically detected via an optical detector such as a photodiode [47], thermopile [63], or pyroelectric [64], or an acoustic detector such as a microphone [44].…”

Section: Optical Gas Sensor Topologiesmentioning

confidence: 99%

“…( b ) Dual detector configuration, with [48,58] or without [54] filters. ( c ) The gas cell can be reduced by increasing the light-gas interaction, e.g., by using photonic crystals [55], optical cavities [56], multi-pass cells [57], or gas enrichment layers [58]. ( d ) Photoacoustic cell.…”

Section: Figurementioning

confidence: 99%

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Towards Integrated Mid-Infrared Gas Sensors

Popa

Udrea

2019

Sensors

208

120

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Optical gas sensors play an increasingly important role in many applications. Sensing techniques based on mid-infrared absorption spectroscopy offer excellent stability, selectivity and sensitivity, for numerous possibilities expected for sensors integrated into mobile and wearable devices. Here we review recent progress towards the miniaturization and integration of optical gas sensors, with a focus on low-cost and low-power consumption devices.

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Section: Discussionmentioning

confidence: 99%

Section: Optical Gas Sensor Topologiesmentioning

confidence: 99%

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Towards Integrated Mid-Infrared Gas Sensors

Popa

Udrea

2019

Sensors

208

120

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“…The distinguishing features of the sensor are low power and low cost. The total power consumption is approximately 1.5 W. Since there are no valves and pumps that consume a lot of power, the power consumption can thus be reduced by about 2 W [33]. The power consumption is comparable to the diffusion-type TDLAS gas sensor, which can also avoid the need of a gas valve and pump [34].…”

Section: Methodsmentioning

confidence: 99%

Highly Sensitive Photoacoustic Microcavity Gas Sensor for Leak Detection

Chen

Zhang

et al. 2020

Sensors

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A highly sensitive photoacoustic (PA) microcavity gas sensor for leak detection is proposed. The miniature and low-cost gas sensor mainly consisted of a micro-electro-mechanical system (MEMS) microphone and a stainless-steel capillary with two small holes opened on the side wall. Different from traditional PA sensors, the designed low-power sensor had no gas valves and pumps. Gas could diffuse into the stainless-steel PA microcavity from two holes. The volume of the cavity in the sensor was only 7.9 μL. We use a 1650.96 nm distributed feedback (DFB) laser and the second-harmonic wavelength modulation spectroscopy (2f-WMS) method to measure PA signals. The measurement result of diffused methane (CH4) gas shows a response time of 5.8 s and a recovery time of 5.2 s. The detection limit was achieved at 1.7 ppm with a 1-s lock-in integral time. In addition, the calculated normalized noise equivalent absorption (NNEA) coefficient was 1.2 × 10−8 W·cm−1·Hz−1/2. The designed PA microcavity sensor can be used for the early warning of gas leakage.

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“…Optical gas sensors based on laser absorption spectroscopy (LAS) can represent a suitable solution for in-situ and fast trace gas detection, since they exploit the laser's narrow spectral resolution, allowing high sensitivity and selectivity [9][10][11][12][13][14][15]. In LAS, the gas concentration information is obtained by detecting the optical intensity via a photodetector.…”

Section: Introductionmentioning

confidence: 99%

Near-Infrared Quartz-Enhanced Photoacoustic Sensor for H2S Detection in Biogas

et al. 2019

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A quartz-enhanced photoacoustic spectroscopy (QEPAS) sensor for H2S detection operating in near-infrared spectral range is reported. The optical source is an erbium-doped fiber amplified laser with watt-level optical power. The QEPAS spectrophone is composed of a quartz tuning fork with a resonance frequency of 7.2 kHz, a quality factor of 8500, and a distance between prongs of 800 µm, and two tubes with a radius of 1.3 mm and a length of 23 mm acting as an organ pipe resonator. With this spectrophone geometry, the photothermal noise contribution of the spectrophone was removed and the theoretical thermal noise level was achieved. The position of both tubes with respect to custom quartz tuning fork has been investigated as a function of signal amplitude, Q-factor, and noise of the QEPAS sensor when a high-power laser was used. Benefit from the linearity of the QEPAS signal to the excitation laser power, a detection sensitivity of 330 ppb for H2S detection was achieved at atmospheric pressure and room temperature, when the laser power was 1.6 W and the signal integration time was set to 300 ms, corresponding to a normalized noise equivalent absorption of 3.15 × 10−9 W cm−1/(Hz)1/2. The QEPAS sensor was then validated by measuring H2S in a biogas sample.

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Highly sensitive photoacoustic gas sensor based on multiple reflections on the cell wall

Cited by 42 publications

References 30 publications

Towards Integrated Mid-Infrared Gas Sensors

Towards Integrated Mid-Infrared Gas Sensors

Highly Sensitive Photoacoustic Microcavity Gas Sensor for Leak Detection

Near-Infrared Quartz-Enhanced Photoacoustic Sensor for H2S Detection in Biogas

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