High quality factor RF inductors using low loss conductor featured with skin effect suppression for standard CMOS/BiCMOS

Iramnaaz, I.; Sandoval, T.; Zhuang, Yan; Schellevis, H.; Rejaei, B.

doi:10.1109/ectc.2011.5898508

Cited by 4 publications

(4 citation statements)

References 25 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The processing details can be found in our previous work [13]. To accommodate the stress/strain, the glass wafer was coated by a thin bisbenzocyclobutene (BCB) polymer layer prior to the metal deposition.…”

Section: Methodsmentioning

confidence: 99%

See 1 more Smart Citation

Self-Biased Low Loss Conductor Featured With Skin Effect Suppression for High Quality RF Passives

et al. 2012

Self Cite

View full text Add to dashboard Cite

We present experimental data for artificial metaconductors exhibiting skin effect suppression at microwave frequencies. The metaconductor consists of a stack comprising twelve periods of alternating ferromagnetic (Permalloy) and normal metal (Cu) layers. Near the effective antiferromagnetic resonant frequency the average in-plane magnetic permeability of the stack approaches zero, leading to an increase in the skin depth. Compared to a Cu-based device, up to 70% loss reduction has been achieved by a metaconductor based coplanar wave guide at 10 GHz without changing the propagation wavelength. Moreover, unlike conventional magnetic devices, no external magnetic bias is required due to the large magnetic anisotropy present in the ferromagnetic layers.Index Terms-Coplanar wave guide, ferromagnetic resonance, magnetic thin film, metamaterial, radio frequency.

show abstract

Section: Methodsmentioning

confidence: 99%

“…Recently, artificial bilayered metaconductor was theoretically and experimentally verified to enable skin effect suppression [11]- [13]. However, an external magnetic field was needed to ensure the magnetization saturated along the coplanar wave guide (CPW).…”

Section: Introductionmentioning

confidence: 99%

Self-Biased Low Loss Conductor Featured With Skin Effect Suppression for High Quality RF Passives

et al. 2012

Self Cite

View full text Add to dashboard Cite

show abstract

“…The CRS conductors are fabricated on a glass substrate using a gold wire as the structural core followed by multiple-step electroplating of Cu/NiFe. Due to the radial shape of the structures, electroplating has been selected as the thin film deposition technique to ensure uniformity as other methods like DC sputtering would not work best for these devices [7][8][9]. Arrays of conductors with different dimensions are fabricated (Fig.…”

Section: The Fabricated Cu/nife Crs Conductorsmentioning

confidence: 99%

“…In the planar superlattice structure, the multiple layers of ferromagnetic/nonferromagnetic metals are used as the conductor where negative permeability of the ferromagnetic material has the effect of cancelling out the eddy currents inside the conductor and allows the current to flow inside the volume to reduce the conductor loss. In [7], a practical application of the planar superlattice structure has been showed where RF inductors using a planar multilayered superlattice structure are fabricated and skin effect suppression and increased quality factors have been demonstrated. In [8] and [9], multilayer interconnects with reduced loss have been reported where the loss and quality factor of a coplanar waveguide (CPW) transmission line has been improved.…”

Section: Introductionmentioning

confidence: 99%

Low loss conductors for CMOS and through glass/silicon via (TGV/TSV) structures using eddy current cancelling superlattice structure

Rahimi

Yoon

2014

2014 IEEE 64th Electronic Components and Technology Conference (ECTC)

View full text Add to dashboard Cite

Superlattice structuresconsisting of nonferromagnetic/ferromagnetic metals have been used to create high performance conductors for radio frequency (RF) transmission lines and low loss vias in CMOS and through silicon/glass via (TSV/TGV) structures, whose ohmic resistance and RC delays have been greatly reduced. Two permalloys of Ni80Fe20 and FeCo are studied as the ferromagnetic materials with low and high magnetization saturation that can be used for designing superlattice structures with low and high GHz frequency ranges, respectively. The effects of design parameters including the number of layers and thickness ratio of the superlattice structures have been studied. Full wave simulations have been used to verify them. Finally, a radial superlattice structure consisting of Cu/NiFe layers has been implemented and its resistance has been compared with the control solid-core devices made of copper; proving the effectiveness of the proposed radial superlattice structure for reducing the RF loss. IntroductionThe operation frequency of monolithic integrated circuits has been growing up and reaching the GHz range in modern communication and consumer electronic applications and the clock frequency of today's microprocessors has reached 3 GHz and tends to move to higher frequencies [1]. One of the limiting factors of the high frequency operation is the radio frequency (RF) loss including the dielectric and conductor loss which are associated with devices and circuits operating in the RF range. The mentioned losses together with the inherent parasitic capacitance in those circuits result in the so called RC time delay, preventing the operating frequencies from going higher. The dielectric loss would be reduced by locally removing the dielectric materials forming air-lifted architectures ([2-3]) or using very low loss dielectric materials [4]. Meantime, most electrodes or interconnectors are adopting copper as a conducting material because of its low electrical resistivity, ease of deposition and moderate cost. However, in higher frequencies, its higher conductivity is not as effective and beneficial as it is in the low frequency and DC operation because of the skin effect, where most current is confined in the outermost surface of the conductor and therefore the volume of the conductor is underutilized. As a result, the effective cross section is reduced in RF frequencies and the resistance and conductor loss are increased. Therefore, the high frequency interconnects, transmission lines and vias in a standard CMOS process and in through silicon/glass via (TSV/TGV) structures suffer from large conductor loss. The larger conductor loss will also be significant in high speed digital circuits including analog-to-digital/digital-to-analog converters and processors

show abstract

High Q-factor Ku band inductor using Cylindrical Radial Superlattice conductor and air-lifted architecture

Rahimi

Yoon

2014

2014 IEEE Antennas and Propagation Society International Symposium (APSURSI)

View full text Add to dashboard Cite

High quality factor RF inductors using low loss conductor featured with skin effect suppression for standard CMOS/BiCMOS

Cited by 4 publications

References 25 publications

Self-Biased Low Loss Conductor Featured With Skin Effect Suppression for High Quality RF Passives

Self-Biased Low Loss Conductor Featured With Skin Effect Suppression for High Quality RF Passives

Low loss conductors for CMOS and through glass/silicon via (TGV/TSV) structures using eddy current cancelling superlattice structure

High Q-factor Ku band inductor using Cylindrical Radial Superlattice conductor and air-lifted architecture

Contact Info

Product

Resources

About