This article presents a new method for fabricating highly conductive gold nanostructures within a polymeric matrix with subwavelength resolution. The nanostructures are directly written in a gold precursor-doped photoresist using a femtosecond pulsed laser. The laser energy is absorbed by a two-photon dye, which induces simultaneous reduction of gold in the precursor and polymerization of the negative photoresist. This results in gold nanoparticle-doped polymeric lines that exhibit both plasmonic effects, due to the constituent gold nanoparticles, and relatively high conductivity (within an order of magnitude of the bulk metal), due to the high density of particles within these lines. Line widths from 150 to 1000 nm have been achieved with this method. Various optically functional structures have been prepared, and their structural and optical properties have been characterized. The influence of laser intensity and scan speed on feature size have been studied and found to be in agreement with predictions of a mathematical model of the process.

Various three-dimensionally (3-D) complex MEMS structures are fabricated using multidirectional ultraviolet (UV) lithography, which includes reverse-side exposure through a UV-transparent substrate, inclined exposure with or without simultaneous substrate rotation, and the combination of these processes. A reverse-side exposure scheme through UV-transparent substrates (e.g., glass, sapphire, or quartz) has been exploited for implementing high-aspect-ratio structures (greater than 20:1), repeatable self-alignment photoresist patterning with subsequent metallization on a BST/sapphire substrate, and unconventional patterning using substrate optics such as proximity patterning or integrated lens techniques. Inclined exposure has been applied to a SU-8 substrate with differing inclination angles and incidence directions. The refractive index of SU-8 is experimentally determined to be 1.68 by means of test structures fabricated using this approach. Implemented structures using the inclined exposure include vertical screen structures, inclined tubes, and conical shape structures. Dynamic mode operation, in which the substrate is continuously rotated and tilted during exposure is also discussed. Examples of achievable 3-D structures using dynamic mode operation are presented.[1581]Index Terms-Inclined exposure, multidirectional ultraviolet (UV) lithography, reverse-side exposure, rotational exposure, SU-8.

Conventional micromolding provides rapid and low-cost methods to fabricate polymer microstructures, but has limitations when producing sophisticated designs. To provide more versatile micromolding techniques, we developed methods based on filling micromolds with polymer microparticles, as opposed to polymer melts, to produce microstructures composed of multiple materials, having complex geometries, and made using mild processing conditions. Polymer microparticles of 1 to 30 µm in size were made from PLA, PGA and PLGA using established spray drying and emulsion techniques either with or without encapsulating model drug compounds. These polymer microparticles were filled into PDMS micromolds at room temperature and melted or bonded together to form microstructures according to different protocols. Porous microstructures were fabricated by ultrasonically welding microparticles together in the mold while maintaining the voids inherent in their packing structure. Multi-layered microstructures were fabricated to have different compositions of polymers and encapsulated compounds located in different regions of the microstructures. More complex arrowhead microstructures were fabricated in a two-step process using a single mold. To assess possible applications, microstructures were designed as microneedles for minimally invasive drug delivery. Multilayer microneedles were shown to insert into cadaver tissue and, according to design, detach from their base substrate and remain embedded in the tissue for controlled release drug delivery over time. We conclude that polymer particlebased micromolding can encapsulate compounds within microstructures composed of multiple materials, having complex geometries, and made using mild processing conditions.

We have designed and fabricated a microneedle array with electrical functionality with the final goal of electroporating skin’s epidermal cells to increase their transfection by DNA vaccines. The microneedle array was made of polymethylmethacrylate (PMMA) by micromolding technology from a master PDMS mold, followed by metal deposition, patterning using laser ablation, and electrodeposition. This microneedle array possessed sufficient mechanical strength to penetrate human skin in vivo and was also able to electroporate both red blood cells and human prostate cancer cells as an in vitro model to demonstrate cell membrane permeabilization. A model to predict the effective volume for electroporation with respect to applied voltages was constructed from finite element simulation. This study demonstrates the mechanical and electrical functionalities of the first MEMS-fabricated microneedle array for electroporation, designed for DNA vaccine delivery.

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A facile, cost-effective, and manufacturable method to produce gold-polymer nanocomposite plasmonic nanorod arrays in high-aspect-ratio nanoporous alumina templates is reported, where the formation of gold nanoparticles and the polymerization of a photosensitive polymer by ultraviolet light are simultaneously performed. Transverse mode coupling within a two-dimensional array of the nanocomposite rods results in a progression of resonant modes in the visible and infrared spectral regions when illuminated at normal incidence, a phenomenon previously observed in nanoarrays of solid gold rods in an alumina template. Finite element full-wave analysis in a three-dimensional computational domain confirms our hypothesis that nanoparticles, arranged in a columnar structure, will show a response similar to that of solid gold rods. These studies demonstrate a new simple method of plasmonic nanoarray fabrication, apparently obviating the need for a cumbersome electrochemical process to grow nanoarrays.

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Administration of protein and DNA biotherapeutics is limited by the need for hypodermic injection. Use of micron-scale needles to deliver drugs in a minimally invasive manner provides an attractive alternative, but application of this approach is limited by the need for suitable microneedle designs and fabrication methods. To address this need, this paper presents a conical polymer microneedle design that is fabricated using a novel integrated lens technique and analyzed for its ability to insert into the skin without mechanical failure. Microneedle master structures were fabricated using microlenses etched into a glass substrate that focused light through SU-8 negative epoxy resist to produce sharply tapered structures. Microneedle replicates were fabricated out of biodegradable polymers by micromolding. Because microneedle mechanical properties are critical to their insertion into the skin, we theoretically modeled two failure modes (axial mode and transverse mode), and analytical models were compared with measured data showing general agreement. Guided by this analysis, polymer microneedles were designed and demonstrated to insert to different depths into porcine skin in vitro. "Long" polymer microneedles were also demonstrated in human subjects to insert deeply without failure.