2013
DOI: 10.1109/led.2013.2281661
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High-Performance Pentacene Thin-Film Transistor With High-$\kappa$ HfLaON as Gate Dielectric

Abstract: Pentacene organic thin-film transistor (OTFT) using high-k HfLaON gate dielectric is proposed, and the effects of varying its nitrogen content are studied. The HfLaON film is deposited using reactive sputtering of Hf-La target in Ar/O 2 /N 2 ambience with different N 2 flow rates and then annealed in N 2 . All the OTFTs can operate at low voltage with a threshold voltage as low as −0.53 V. The OTFT with an optimal nitrogen content can achieve a carrier mobility of 0.71 cm 2 / V · s, which is about twice that o… Show more

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Cited by 14 publications
(7 citation statements)
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“…Recently, the addition of La has been reported to suppress the oxygen vacancies in Hfbased high-j materials, 14,15 and HfLaO was used as gate dielectric for high-performance pentacene OTFTs, showing high carrier mobility, small threshold voltage, low hysteresis, and small sub-threshold swing (SS). 16,17 Nb 2 O 5 has high j value ($29), but it has small band gap ($4.4 eV) and suffers from a high concentration of oxygen vacancies, 18 whose gap states lead to charge trapping. On the other hand, La 2 O 3 has larger band gap ($6 eV), but it is very hygroscopic and unstable in air, easily forming hydroxide.…”
mentioning
confidence: 99%
“…Recently, the addition of La has been reported to suppress the oxygen vacancies in Hfbased high-j materials, 14,15 and HfLaO was used as gate dielectric for high-performance pentacene OTFTs, showing high carrier mobility, small threshold voltage, low hysteresis, and small sub-threshold swing (SS). 16,17 Nb 2 O 5 has high j value ($29), but it has small band gap ($4.4 eV) and suffers from a high concentration of oxygen vacancies, 18 whose gap states lead to charge trapping. On the other hand, La 2 O 3 has larger band gap ($6 eV), but it is very hygroscopic and unstable in air, easily forming hydroxide.…”
mentioning
confidence: 99%
“…From another perspective, with Zr, Nb or Y added in La 2 O 3 , the moisture absorption of La 2 O 3 could be suppressed, and so larger pentacene grains were grown on the smoother oxide surface (Figure 15a), thus resulting in higher carrier mobility. Table 4 lists the device properties of pentacene OTFT's with La-based ternary oxides as gate dielectrics [41,[118][119][120][121][122], with both NbLaO and TaLaO providing carrier mobility higher than 1 cm 2 /Vs. Similar to IGZO TFT, NbLaO can also achieve high performance for OTFT (high carrier mobility and high on/off ratio), which indicates its high potential in the applications of flexible electronics.…”
Section: Thin-film Transistors (Tfts)mentioning
confidence: 99%
“…For instance, in the case of OTFT-based sensors, relatively high voltages are needed to obtain proper device functionality, thus reducing their actual portability and raising serious safety concerns for their application on-body and their integration with biochemical elements. Although several strategies for low voltage operation have been reported [ 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 ], only a few are exploited with large-area processes [ 25 , 26 , 27 , 28 ]. In these last cases, the application of OTFTs to sensing applications is not yet explored.…”
Section: Introductionmentioning
confidence: 99%