2008 IEEE International Electron Devices Meeting 2008
DOI: 10.1109/iedm.2008.4796663
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High immunity to threshold voltage variability in undoped ultra-thin FDSOI MOSFETs and its physical understanding

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Cited by 147 publications
(97 citation statements)
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“…Tolerance to low channel doping additionally boosts mobility and performance and reduces local (statistical) variability [11]- [16]. This research and corresponding technology development has culminated in the introduction of 28-nm fully depleted silicon-on-insulator (FDSOI) CMOS by STMicroelectronics [17] and 22-and 14-nm FinFET CMOS by Intel [18] and Samsung [19].…”
mentioning
confidence: 99%
“…Tolerance to low channel doping additionally boosts mobility and performance and reduces local (statistical) variability [11]- [16]. This research and corresponding technology development has culminated in the introduction of 28-nm fully depleted silicon-on-insulator (FDSOI) CMOS by STMicroelectronics [17] and 22-and 14-nm FinFET CMOS by Intel [18] and Samsung [19].…”
mentioning
confidence: 99%
“…By that, it decreases the variability [8], and it will have better matching for short channel devices. Also, the absence of channel doping and pocket implants in the fully depleted transistor produces lower noise specifications and higher gains when compared to bulk technologies.…”
Section: -Nm Utbb Fd-soimentioning
confidence: 99%
“…Fully depleted (FD) SOI transistors with undoped channels are ideally suited for low power applications [21]. Substrates for FD devices require very thin Si films, of the order of 20 nm with the uniformity range of <1 nm.…”
Section: Ecs Transactions 19 (4) 3-14 (2009)mentioning
confidence: 99%