Getter free vacuum packaging for MEMS

Gan, Zhiyin; Huang, Dexiu; Wang, Xuefang; Lin, Dong; Liu, Sheng

doi:10.1016/j.sna.2008.10.014

Cited by 31 publications

(21 citation statements)

References 23 publications

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“…We have independently modelled this effect and found stark, but advantageous, differences from the original study by Gan et al 180 . We suspect that an error was made in tabulating their results, which also clarifies their unexplained lifetime increase for 100 mbar cavities.…”

Section: Direct Bondingmentioning

confidence: 84%

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Contributed Review: The feasibility of a fully miniaturized magneto-optical trap for portable ultracold quantum technology

Rushton

Aldous

Himsworth

2014

Review of Scientific Instruments

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Experiments using laser cooled atoms and ions show real promise for practical applications in quantumenhanced metrology, timing, navigation, and sensing as well as exotic roles in quantum computing, networking and simulation. The heart of many of these experiments has been translated to microfabricated platforms known as atom chips whose construction readily lend themselves to integration with larger systems and future mass production. To truly make the jump from laboratory demonstrations to practical, rugged devices, the complex surrounding infrastructure (including vacuum systems, optics, and lasers) also needs to be miniaturized and integrated. In this paper we explore the feasibility of applying this approach to the Magneto-Optical Trap; incorporating the vacuum system, atom source and optical geometry into a permanently sealed microlitre system capable of maintaining 10 −10 mbar for more than 1000 days of operation with passive pumping alone. We demonstrate such an engineering challenge is achievable using recent advances in semiconductor microfabrication techniques and materials.PACS numbers: 07.07.Df, 37.10.Gh, 07.30.Kf, I. ULTRACOLD QUANTUM TECHNOLOGYSince the first demonstrations of atoms and ions at sub-millikelvin temperatures in the mid-1980s, the field of atomic physics has been revolutionized by laser cooling and trapping as it provides researchers with a method to probe some of the purest and sensitive quantum systems available. This field is still highly productive and recently has put significant emphasis on the practical applications of this technology beyond the laboratory 1,2 . It was evident very early on that ultracold matter would be an indispensable tool in precise timing applications and a recent demonstration 3 has shown extremely low instabilities at the 10 −18 level. The wavelike nature of atoms as they are cooled to lower temperatures can be used to form atomic interferometers that outperform optical counterparts in measurements of accelerated reference frames 4-7 , which are important for inertial guidance systems, but can also provide sensitive measurements of mass, charge and magnetic fields [8][9][10][11] . Greater sensitivity beyond the classical limit is possible via squeezed 12 and entangled states 13-15 , which are also fundamental attributes for quantum computing 16,17 , and long distance quantum networking 18 . Ultracold matter has been used in the emerging field of quantum simulation 19 and is an indispensable tool in determining fundamental constants 20 , testing general relativity 21 and defining measurement standards 22 . Many researchers and industries believe such tools will be a major part of the 'second quantum revolution' in which the more 'exotic' properties of quantum physics are applied for practical applications 23,24 .The field of ultracold matter has reached a matua) m.d.himsworth@soton.ac.uk rity in both experimental methods and theoretical understanding allowing experiments to begin leaving the laboratory 25-27 . These systems are bespoke, rarely take up a ...

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Section: Direct Bondingmentioning

confidence: 84%

“…This can be achieved practically by introducing a buffer cavity, or moat, within the seam such that the slow leakage into the moat results in an even slower leakage into the main vacuum cavity 180 . This can be modeled by the following formulae and solved numerically:…”

Section: Direct Bondingmentioning

confidence: 99%

Contributed Review: The feasibility of a fully miniaturized magneto-optical trap for portable ultracold quantum technology

Rushton

Aldous

Himsworth

2014

Review of Scientific Instruments

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“…Outgassing from the internal material layers of a MEMS device can contribute significantly to the degradation of vacuum within a cavity (Gan et al 2008). Devices that require a vacuum for optimum operation are often sealed using the most hermetic packaging techniques requiring high temperatures which can influence outgassing into the cavity.…”

Section: Outgassingmentioning

confidence: 99%

“…The results can also be used to find a suitable getter should it not be possible to change materials and processes. RGA is however destructive and expensive and getters are not always a suitable answer to outgassing issues (Gan et al 2008).…”

Section: Outgassingmentioning

confidence: 99%

Leak detection methods for glass capped and polymer sealed MEMS packaging

2011

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This paper presents the limitations of the helium leak test when applied to typical MEMS packages. A novel closed-form expression is presented which allows the determination of the minimum cavity volume package that can be accurately tested using the helium leak test method in conjunction with a standard gross leak test. This expression can be used to find optimum test parameters for packages with cavity volumes greater than 2.6 9 10 -3 cm 3 . Hermeticity testing using FTIR and Raman spectroscopy are considered as potential methods to overcome the limitations of the helium leak test method.

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“…Q factor measurements are limited by complicated circuits and not sufficient sensitivity at the level of low pressures [8,9], thus, it cannot precisely measure small pressure change inside a sealed micro-cavity [10]. Our group reported on-line monitoring method using embedded resonator [11,12]. However, for these sensors, their fabrications are complicated and expensive, and they are proved to have low pressure sensitivity under 10 Pa.…”

Section: Introductionmentioning

confidence: 99%