“…On the other hand, in reference
25–29, a detailed analysis from the physical point of view was presented for the different components of gate tunneling currents observed in FinFETs. These tunneling currents include: (1) the direct tunneling current through the gate dielectric, along the channel, when the transistor is operating in inversion I G,inv ; (2) the tunneling current through the gate dielectric when the device is in depletion due to charges generated in the channel
; (3) the Trap Assisted Tunneling current in the drain overlap region I G,TAT ; (4) the gate‐induced drain leakage current (GIDL) through the overlap region at the drain when the device is in depletion, which is also called transversal GIDL or T‐GIDL,
29 .…”