Field emission from diamond-like carbon films and fabrication of gated diamond-like carbon film emitter

Lee, Sunup; Chung, Bokeon; Ko, Tae-Young; Jeon, D.; Lee, Kwang-Ryeol; Eun, Kwang Yong

doi:10.1016/s0304-3991(97)00130-7

Cited by 8 publications

(4 citation statements)

References 7 publications

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“…The first carbon based films that triggered attention in terms of their field emission properties were a-C:H, a-C:N and diamond-like (DLC) coatings [1][2][3][4][5][6][7][8]. However, after the discovery of carbon nanotubes and the development of techniques for their production in macroscopic quantities, there has been an increasing interest in their field emission characteristics [9][10][11]. In such studies, single walled and multi-walled carbon nanotubes were derived from the carbon soot produced by an electric arc discharge in high helium (or other inert background) gas pressure.…”

Section: Introductionmentioning

confidence: 99%

Field emission properties of nanocomposite carbon nitride films

Alexandrou

Baxendale

Amaratunga

et al. 2000

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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A modified cathodic arc technique has been used to deposit carbon nitride thin films directly on n + Si substrates. Transmission Electron Microscopy showed that clusters of fullerene-like nanoparticles are embedded in the deposited material. Field emission in vacuum from as-grown films starts at an electric field strength of 3.8 V/µm. When the films were etched in an HF:NH 4 F solution for ten minutes, the threshold field decreased to 2.6 V/µm.The role of the carbon nanoparticles in the field emission process and the influence of the chemical etching treatment are discussed.

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Section: Introductionmentioning

confidence: 99%

Field emission properties of nanocomposite carbon nitride films

Alexandrou

Baxendale

Amaratunga

et al. 2000

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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“…6 The deposition apparatus is schematically shown in Fig. 6 Before further processing, the emission from our DLC film was confirmed using a diode type emission measurement. One ion gun sputters a carbon target for film deposition and the other ion gun is used to clean the substrate or dope the DLC film with, for example, nitrogen.…”

Section: Fabricationmentioning

confidence: 99%

“…2. 6 On the DLC, we deposited a silicon oxide insulator layer using atmospheric-pressure chemical vapor deposition ͑CVD͒, and an aluminum layer for use as a gate was deposited using an e-beam evaporator. Properties of the sputter-grown DLC are known to be similar to the laser ablation-grown DLC.…”

Section: Fabricationmentioning

confidence: 99%

Fabrication and simulation of a gated thin film emitter

Ko¹

1998

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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We have fabricated a gated field emitter using a diamond-like carbon ͑DLC͒ film cathode. The process involved the deposition of DLC, insulator, and gate layers followed by backetching to expose a patterned DLC. We also simulated the emission behavior of the gated DLC cathode. The emission sites on the DLC film were simulated by multiple sharp points formed on the DLC surface. The electron trajectory and the emission current were studied as a function of structural parameters such as cathode height, oxide layer thickness, gate hole diameter, and focus electrode.

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“…Justamente por não serem necessárias as estruturas pontiagudas, o custo de produção de emissores planares pode ser muito reduzido 1 o que faz com que sejam encarados como uma excelente alternativa para a produção de FPDs [57, 58J. Além disso, o fato do emissor ser constituído apenas de um filme plano, simplifica a obtenção de FPDs de grande área [58].…”

Section: Obtenção De Triodos Pelo Processo Spindtunclassified

Novos processos e configurações para mostradores planos de informação

Mammana¹

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Oue of the most important challenges to the electronks índustry i5 the production of a fiat panel display which fulfills the requirements of high quaiíty irnage 1 large area t low power and low cost. Field Emission Display (FED) is the technoJogy in best oonditions to face these l'cquirements, However, the short lifetime and low reiiability of FED prototypes based ou metaUíc ernitters are hindering this technology to get iuto the market. In this work we investigate two different approaches that could represent a solution for these problems: improvement of the vacuum cha racterístics inside the emission cbamber and use of carbon nanotubes as emitters. With respect to the improvement af vacumn ín a FED, this work proposes a new type of emitter based on a porous díamond membrane. Theoretical calcu)ations referent to the vacuum properties and referent to ele<::trostatic field enhancement fador are presented. A new mode! is proposed to determine the superior limit for the eletrostatic field enhancement fador in a porous emitter. With respect to tbe experimental part of this work, we show that diamond porous membranes indeed emit eledrons, according to the original proposition. The emission performance of these membranes is oompared to the performance of flat metalic emitters: coated or not with diamond-like carbon. Images of emissiôn spôts in pores and a study of the long term membrane emission stabiHty are presented. \Vith respect to carbon nanotubes, thls work presents a new treatment process! under plasma are) that re sulted in emission improvement. A study 011 emission stability of nanotubes ia a150 presented) and systematical emission decay is reporte

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Field emission from diamond-like carbon films and fabrication of gated diamond-like carbon film emitter

Cited by 8 publications

References 7 publications

Field emission properties of nanocomposite carbon nitride films

Field emission properties of nanocomposite carbon nitride films

Fabrication and simulation of a gated thin film emitter

Novos processos e configurações para mostradores planos de informação

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