2019
DOI: 10.1007/s00542-019-04516-x
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Fast packaging of glass-based microfluidic chip using adhesive polyurethane material

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Cited by 5 publications
(2 citation statements)
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“…Furthermore, in terms of reusability, glass devices are superior to organic polymers such as polydimethylsiloxane (PDMS) and polylactic acid, which are popular materials for microfluidic devices. [27][28][29][30][31][32] The key technology used for the monolithic fabrication of the proposed device is selective laser-induced etching (SLE) (i.e., femtosecond laser-assisted chemical etching and laserassisted selective etching) based on ultrafast lasers. SLE is a mask-less two-step fabrication process comprising ultrafast laser direct writing and chemical wet etching.…”
Section: Introductionmentioning
confidence: 99%
“…Furthermore, in terms of reusability, glass devices are superior to organic polymers such as polydimethylsiloxane (PDMS) and polylactic acid, which are popular materials for microfluidic devices. [27][28][29][30][31][32] The key technology used for the monolithic fabrication of the proposed device is selective laser-induced etching (SLE) (i.e., femtosecond laser-assisted chemical etching and laserassisted selective etching) based on ultrafast lasers. SLE is a mask-less two-step fabrication process comprising ultrafast laser direct writing and chemical wet etching.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3] Apart from the function of mounting die, the polymer layer also provides the capability of isolating the die from thermal stress induced by temperature change. [4] Therefore, the packaging quality heavily depends on the polymer property, such as Glass transition temperature (T g ), Young's modulus and shear modulus, because these parameters have a great influence on the residual stress level and long-term stability of packaged devices. [5][6] However, the polymer property is critically related to the parameters of curing process during which the polymer transforms into solid state from liquid state, therefore, to obtain the property experimentally is very complicated and expensive.…”
Section: Introductionmentioning
confidence: 99%