Fabrication of polyimide microfluidic devices by laser ablation based additive manufacturing

Hu, Xingjian; Yang, Fan; Guo, Mingzhao; Pei, Jiayun; Zhao, Haiyan; Wang, Yujun

doi:10.1007/s00542-019-04698-4

Cited by 19 publications

(14 citation statements)

References 26 publications

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“…After the laser micromachining step (Figure 2C), the PI substrates, still on the flat silicon pieces, have been cleaned with nitrogen gas to remove dirty volatile traces of carbonaceous residues resulting from the ablation of PI. 46,47 2.3. Preparation of the Drop-cast PVDF-CB Bottom Electrode.…”

Section: Methodsmentioning

confidence: 99%

Metal-Free Multilayer Hybrid PENG Based on Soft Electrospun/-Sprayed Membranes with Cardanol Additive for Harvesting Energy from Surgical Face Masks

Mariello

Qualtieri

Mele

et al. 2021

ACS Appl. Mater. Interfaces

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Disposable surgical face masks are usually used by medical/nurse staff but the current Covid-19 pandemic has caused their massive use by many people. Being worn closely attached to the people’s face, they are continuously subjected to routine movements, i.e., facial expressions, breathing, and talking. These motional forces represent an unusual source of wasted mechanical energy that can be rather harvested by electromechanical transducers and exploited to power mask-integrated sensors. Typically, piezoelectric and triboelectric nanogenerators are exploited to this aim; however, most of the current devices are too thick or wide, not really conformable, and affected by humidity, which make them hardly embeddable in a mask, in contact with skin. Different from recent attempts to fabricate smart energy-harvesting cloth masks, in this work, a wearable energy harvester is rather enclosed in the mask and can be reused and not disposed. The device is a metal-free hybrid piezoelectric nanogenerator (hPENG) based on soft biocompatible materials. In particular, poly(vinylidene fluoride) (PVDF) membranes in the pure form and with a biobased plasticizer (cardanol oil, CA) are electrospun onto a laser-ablated polyimide flexible substrate attached on a skin-conformable elastomeric blend of poly(dimethylsiloxane) (PDMS) and Ecoflex. The multilayer structure of the device harnesses the piezoelectricity of the PVDF nanofibers and the friction triboelectric effects. The ultrasensitive mechanoelectrical transduction properties of the composite device are determined by the strong electrostatic behavior of the membranes and the plasticization effect of cardanol. In addition, encapsulation based on PVDF, PDMS, CA, and parylene C is used, allowing the hPENG to exhibit optimal reliability and resistance against the wet and warm atmosphere around the face mask. The proposed device reveals potential applications for the future development of smart masks with coupled energy-harvesting devices, allowing to use them not only for anti-infective protection but also to supply sensors or active antibacterial/viral devices.

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Section: Methodsmentioning

confidence: 99%

Metal-Free Multilayer Hybrid PENG Based on Soft Electrospun/-Sprayed Membranes with Cardanol Additive for Harvesting Energy from Surgical Face Masks

Mariello

Qualtieri

Mele

et al. 2021

ACS Appl. Mater. Interfaces

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“…Depending on the imide monomers used for the polymerization, different kinds of PI can be obtained and the 3,4,3′,4′-biphenyltetracarboxylic dianhydride -p-phenylene diamine (BPDA/PPD) is the most commonly used in the biomedical field due to its biocompatibility. [162][163][164][165][166] PI is commonly used as a spinnable substrate (after proper curing), sacrificial layer, or adhesion layer: [167][168][169] most of the flexible/stretchable neural implants are made of a skeleton in PI as a carrier for microelectronic devices, embedded in a soft elastomer. [170,171] As for parylene, studies on long-term reliability of PI have been conducted through PBS soaking tests of microelectrode arrays (MEAs) and IDE patterns, resulting in equivalent lifetimes of 66 days at 75 °C (2.5 years at 37 °C) with 10 µm-thick encapsulation [155] and 300 days at 60 °C (4-7 years at 37 °C) with 5-12.5 µm-thick encapsulation.…”

Section: Single-layer Tfementioning

confidence: 99%

Recent Advances in Encapsulation of Flexible Bioelectronic Implants: Materials, Technologies, and Characterization Methods

Mariello

Kim

et al. 2022

Advanced Materials

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Bioelectronic implantable systems (BIS) targeting biomedical and clinical research should combine long‐term performance and biointegration in vivo. Here, recent advances in novel encapsulations to protect flexible versions of such systems from the surrounding biological environment are reviewed, focusing on material strategies and synthesis techniques. Considerable effort is put on thin‐film encapsulation (TFE), and specifically organic–inorganic multilayer architectures as a flexible and conformal alternative to conventional rigid cans. TFE is in direct contact with the biological medium and thus must exhibit not only biocompatibility, inertness, and hermeticity but also mechanical robustness, conformability, and compatibility with the manufacturing of microfabricated devices. Quantitative characterization methods of the barrier and mechanical performance of the TFE are reviewed with a particular emphasis on water‐vapor transmission rate through electrical, optical, or electrochemical principles. The integrability and functionalization of TFE into functional bioelectronic interfaces are also discussed. TFE represents a must‐have component for the next‐generation bioelectronic implants with diagnostic or therapeutic functions in human healthcare and precision medicine.

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“…Glass/silicon-based microfluidic devices are fabricated using lithography and etching techniques (Kim et al., 2019 ; Vasilescu et al., 2020 ). Polymer-based microfluidics are fabricated using lithography (Mukherjee et al., 2019 ; Kajtez et al., 2020 ), laser ablation (Shaegh et al., 2018 ; Gao et al., 2019 ; Hu et al., 2020 ), injection molding (Li et al., 2020 ; Ma et al., 2020 ), hot embossing (Lin et al., 2017 ; Lauri et al., 2019 ) and 3D printing (Macdonald et al., 2017 ; Romanov et al., 2018 ; Vasilescu et al., 2020 ).…”

Section: Approaches For Efficient Microfluidicsmentioning

confidence: 99%

Merits and advances of microfluidics in the pharmaceutical field: design technologies and future prospects

et al. 2022

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Microfluidics is used to manipulate fluid flow in micro-channels to fabricate drug delivery vesicles in a uniform tunable size. Thanks to their designs, microfluidic technology provides an alternative and versatile platform over traditional formulation methods of nanoparticles. Understanding the factors that affect the formulation of nanoparticles can guide the proper selection of microfluidic design and the operating parameters aiming at producing nanoparticles with reproducible properties. This review introduces the microfluidic systems’ continuous flow (single-phase) and segmented flow (multiphase) and their different mixing parameters and mechanisms. Furthermore, microfluidic approaches for efficient production of nanoparticles as surface modification, anti-fouling, and post-microfluidic treatment are summarized. The review sheds light on the used microfluidic systems and operation parameters applied to prepare and fine-tune nanoparticles like lipid, poly(lactic-co-glycolic acid) (PLGA)-based nanoparticles as well as cross-linked nanoparticles. The approaches for scale-up production using microfluidics for clinical or industrial use are also highlighted. Furthermore, the use of microfluidics in preparing novel micro/nanofluidic drug delivery systems is presented. In conclusion, the characteristic vital features of microfluidics offer the ability to develop precise and efficient drug delivery nanoparticles.

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Fabrication of polyimide microfluidic devices by laser ablation based additive manufacturing

Cited by 19 publications

References 26 publications

Metal-Free Multilayer Hybrid PENG Based on Soft Electrospun/-Sprayed Membranes with Cardanol Additive for Harvesting Energy from Surgical Face Masks

Metal-Free Multilayer Hybrid PENG Based on Soft Electrospun/-Sprayed Membranes with Cardanol Additive for Harvesting Energy from Surgical Face Masks

Recent Advances in Encapsulation of Flexible Bioelectronic Implants: Materials, Technologies, and Characterization Methods

Merits and advances of microfluidics in the pharmaceutical field: design technologies and future prospects

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