Fabrication of a Wheatstone-Bridge Integrated SU-8 Cantilever

Abstract

We describe the design and fabrication of an SU-8 cantilever with an integrated Wheatstone-bridge configuration. A photolithographic process of SU-8 on an anisotropically wet-etched Si substrate is used to produce reliable sharp tips. Changes in the surface stress on the cantilever are detected by an integrated Au piezoresistor. Preliminary results of the measurement are presented for cantilever evaluation. The fabricated SU-8 cantilever has a resonance frequency of about 4.5 kHz, which yields a spring constant of approximately 0.15 N/m. These cantilevers are very suitable for the nondestructive atomic force microscope (AFM) analysis of fragile biological samples, such as cells and body fluids.

Numerical investigation of perforated polymer microcantilever sensor for contractile behavior of cardiomyocytes

“…Young's modulus and Poisson's ratio for the microcantilever material were assumed to be 2 GPa and 0.22, respectively. 30) Figure 4 shows the representative results from the static analysis under the prescribed conditions. As shown in Figs.…”

Fabrication of polymer cantilever integrated full-bridge as a piezoresistive sensor

“…The thickness of cantilever also known to be related with the generation of enhanced vertical resolution. The cantilever fabricated with SU-8 (E SU-8 =4.2GPa) photoresist have the thickness smaller than 1 μm known to yield high vertical resolution [7][8][9]. The SU-8 is known to have good mechanical properties, water insolubility, bio-compatibility, and chemical durability following the polymerization.…”