Fabrication of polymer cantilever integrated full-bridge as a piezoresistive sensor

Abstract

In this study, we describe the design and fabrication of polymer (SU-8) cantilever with integrated Full-bridge strain sensor. Changes in the surface stress on the SU-8 cantilever are detected by integrated Au strain sensors. Results showed that the full-bridge integrated SU-8 cantilever provides much higher sensitivity than those of conventional type cantilever. The fabricated SU-8 cantilever having the spring constant os 0.2N/m showed a maximum resonance frequency value 5KHZ.978-1-4244-8168-2/10/$26.00 ©2010 IEEE