We describe the design and fabrication of an SU-8 cantilever with an integrated Wheatstone-bridge configuration. A photolithographic process of SU-8 on an anisotropically wet-etched Si substrate is used to produce reliable sharp tips. Changes in the surface stress on the cantilever are detected by an integrated Au piezoresistor. Preliminary results of the measurement are presented for cantilever evaluation. The fabricated SU-8 cantilever has a resonance frequency of about 4.5 kHz, which yields a spring constant of approximately 0.15 N/m. These cantilevers are very suitable for the nondestructive atomic force microscope (AFM) analysis of fragile biological samples, such as cells and body fluids.
We introduce a novel fabrication method of a tungsten tip for STM applications. It uses a gradual meniscus descending phenomena caused by the thanks of a Teflon structure with the hydrophobicity. The fabricated tungsten tips with high aspect ratio have curvature radius of 20nm or even less. Good reproducibility is experimentally demonstrated by the use of the new etching system. Finally, field emission behaviors of the fabricated tungsten tips are characterized in a high vacuum condition.Abstract -We introduce a novel fabrication method of a tungsten tip for STM applications. It uses a gradual meniscus descending phenomena caused by the thanks of a Teflon structure with the hydrophobicity. The fabricated tungsten tips with high aspect ratio have curvature radius of 20nm or even less. Good reproducibility is experimentally demonstrated by the use of the new etching system. Finally, field emission behaviors of the fabricated tungsten tips are characterized in a high vacuum condition.
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