2015 30th Symposium on Microelectronics Technology and Devices (SBMicro) 2015
DOI: 10.1109/sbmicro.2015.7298107
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Fabrication of 60 channel microelectrode arrays for future use with cultured neuronal networks

Abstract: Stimulation and recording of nerve cells is a procedure used for several applications, such as clinical therapies, study of basic neuroscience, and neural prostheses. Microtechnology and advances in material science have allowed to produce more sophisticated devices and with more functions. This paper focuses on the fabrication of planar 60-channel MEAs. The electrical characterization of the noise level from the TiN electrodes showed good sensitivity to noise, compatible with commercial systems. These electro… Show more

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“…One can use an inverted microscope (transmitted light) to study a sample from the bottom side of a glass MEA. 1 Another benet of glass is that it is an insulator, so any conduction is mainly in the traces leading to a less noisy signal with better Signal-to-Noise Ratio (SNR). Since MEA are used with living cells in culture for several weeks and in some assays months, the biocompatible properties 10,11 of glass additionally make it a good substrate material to fabricate MEAs.…”
Section: Introductionmentioning
confidence: 99%
“…One can use an inverted microscope (transmitted light) to study a sample from the bottom side of a glass MEA. 1 Another benet of glass is that it is an insulator, so any conduction is mainly in the traces leading to a less noisy signal with better Signal-to-Noise Ratio (SNR). Since MEA are used with living cells in culture for several weeks and in some assays months, the biocompatible properties 10,11 of glass additionally make it a good substrate material to fabricate MEAs.…”
Section: Introductionmentioning
confidence: 99%