Fabrication and characterization of a piezoelectric accelerometer

Reus, R. de; Gulløv, Jens Ole; Scheeper, P.R.

doi:10.1088/0960-1317/9/2/005

Cited by 48 publications

(27 citation statements)

References 6 publications

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“…The sensitivity of the device was found to be 16 pC/m/s 2 in the z-direction which is excellent especially when compared to other micromachined silicon accelerometers using thin-®lm piezoelectric sensing materials. For example, the device presented in [10] which consists of a sputtered zinc oxide (ZnO) piezoelectric ®lm has a sensitivity of 0.15 pC/m/s 2 . In this instance, the advantage of the thick-®lm piezoelectric layer is clear.…”

Section: Accelerometer Resultsmentioning

confidence: 99%

Microprocessor implemented self-validation of thick-film PZT/silicon accelerometer

Beeby¹,

Grabham²,

White³

2001

Sensors and Actuators A: Physical

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This paper describes a piezoelectric micromachined silicon accelerometer fabricated using a combination of thick-®lm printing and silicon micromachining and introduces a microprocessor implemented self-validation routine for the device. The thick-®lm printed PZT elements act as sensors detecting the de¯ections of the inertial mass and also as actuators capable of performing a self-test routine. The selfvalidation procedure is performed at resonance and therefore, a microprocessor is used to identify the resonant frequency associated with each device and con®rm the operation of the PZT elements. Whilst, this approach is certainly feasible, its implementation can be simpli®ed by reducing the cross-talk between drive and detection elements and altering the geometry of the accelerometer. The performance of the device demonstrates the suitability of thick-®lm printed piezoelectrics for this type of application. #

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Section: Accelerometer Resultsmentioning

confidence: 99%

Microprocessor implemented self-validation of thick-film PZT/silicon accelerometer

Beeby¹,

Grabham²,

White³

2001

Sensors and Actuators A: Physical

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“…Considering a distributed force, F, acting perpendicularly to the cantilever surface as shown in Fig. 1(a), the inverse of the radius of curvature (r) can be expressed as, process sequence suitable for batch fabrication of both accelerometers and encapsulation [7]. The single-chip accelerometer can be fitted into a flat package which is advantageous for SHM applications [7].…”

Section: Displacement Modellingmentioning

confidence: 99%

“…encapsulation [7]. The single-chip accelerometer can be fitted into a flat package which is advantageous for SHM applications [7].…”

mentioning

confidence: 99%

“…The single-chip accelerometer can be fitted into a flat package which is advantageous for SHM applications [7]. The piezoelectric accelerometer, which is the main scope of this paper, consists of two components: a piezoelectric material and a seismic mass.…”

mentioning

confidence: 99%

“…The design and fabrication of micromachined piezoelectric accelerometers have been reported widely [7][8][9][10][11][12][13][14]. Such an accelerometer will record translational and rotational inertial accelerations, as well as gravitational acceleration, as long as parts of these acceleration vectors are in line with the accelerometer's axis of sensitivity.…”

mentioning

confidence: 99%

See 2 more Smart Citations

A Simple Analytical Model for MEMS Cantilever Beam Piezoelectric Accelerometer and High Sensitivity Design for SHM (structural health monitoring) Applications

Raaja¹,

Rathnasami²,

Sumangala³

2017

Transactions on Electrical and Electronic Materials

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Cantilever beam MEMS piezoelectric accelerometers are the simplest and most widely used accelerometer structure. This paper discusses the design of a piezoelectric accelerometer exclusively for SHM applications. While such accelerometers need to operate at a lower frequency range, they also need to possess high sensitivity and low noise floor. The availability of a simple model for deflection, charge, and voltage sensitivities will make the accelerometer design procedure less cumbersome. However, a review of the open literature suggests that such a model has not yet been proposed. In addition, previous works either depended on FEM analysis or only reported on the fabrication and characterization of piezoelectric accelerometers. Hence, this paper presents, for the first time, a simple analytical model developed for the deflection, induced voltage, and charge sensitivity of a cantilever beam piezoelectric accelerometer.The model is then verified using FEM analysis for a range of different cases. Further, the model was validated by comparing the induced voltages of an accelerometer estimated using this model with experimental voltages measured in the accelerometer after fabrication. Subsequently, the design of an accelerometer is demonstrated for SHM applications using the analytical model developed in this work. The designed accelerometer has 60 mV/g voltage sensitivity and 2.4 pC/g charge sensitivity, which are relatively high values compared to those of the piezoresistive and capacitive accelerometers for SHM applications reported earlier.

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Theoretical analysis of the sensing and actuating effects of piezoelectric multimorph cantilevers

et al. 2005

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The paper presents the modeling of two types of piezoelectric microcantilevers, the two-layer and twosegment piezoelectric cantilevers, in which the two piezoelectric parts perform sensor and actuator functions, respectively. An analytic model is proposed to evaluate the sensing and actuating effects of multiporph microcantilevers formed of several layers or segments of piezoelectric materials. The analytical model is used to analyze the tip deflection of the cantilever and the piezoelectric charge generated on the sensor element as a function of the microcantilever geometry. The cantilevers of sensing and actuation are compared for the different working situations of the two-layer and two-segment cantilevers. The theoretical results can be used to optimize the design of the piezoelectric cantilever structures.

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Fabrication and characterization of a piezoelectric accelerometer

Cited by 48 publications

References 6 publications

Microprocessor implemented self-validation of thick-film PZT/silicon accelerometer

Microprocessor implemented self-validation of thick-film PZT/silicon accelerometer

A Simple Analytical Model for MEMS Cantilever Beam Piezoelectric Accelerometer and High Sensitivity Design for SHM (structural health monitoring) Applications

Theoretical analysis of the sensing and actuating effects of piezoelectric multimorph cantilevers

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