Microprocessor implemented self-validation of thick-film PZT/silicon accelerometer

Beeby, Steve; Grabham, Neil; White, NM

doi:10.1016/s0924-4247(01)00559-3

Cited by 20 publications

(11 citation statements)

References 10 publications

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“…The aim of this work is to develop guidelines for the design and manufacture of piezoelectric accelerometers for structural health monitoring. Active materials with larger piezoelectric constants, such as Lead ZirconateTitanate (PZT), can widen the performance gap of piezoelectric accelerometers [11,[18][19][20][21][22][23][24][25][26][27]. Zinc Oxide (ZnO) has also been employed for active piezoelectric film due to its relatively simple and repeatable deposition using single-target RF sputtering, the ability to produce largearea films without pinholes, and proven compatibility with IC (integrated circuit) integration [28][29][30].…”

Section: E T E T E E T T T T T T D E T E Tmentioning

confidence: 99%

A Simple Analytical Model for MEMS Cantilever Beam Piezoelectric Accelerometer and High Sensitivity Design for SHM (structural health monitoring) Applications

Raaja¹,

Rathnasami²,

Sumangala³

2017

Transactions on Electrical and Electronic Materials

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Cantilever beam MEMS piezoelectric accelerometers are the simplest and most widely used accelerometer structure. This paper discusses the design of a piezoelectric accelerometer exclusively for SHM applications. While such accelerometers need to operate at a lower frequency range, they also need to possess high sensitivity and low noise floor. The availability of a simple model for deflection, charge, and voltage sensitivities will make the accelerometer design procedure less cumbersome. However, a review of the open literature suggests that such a model has not yet been proposed. In addition, previous works either depended on FEM analysis or only reported on the fabrication and characterization of piezoelectric accelerometers. Hence, this paper presents, for the first time, a simple analytical model developed for the deflection, induced voltage, and charge sensitivity of a cantilever beam piezoelectric accelerometer.The model is then verified using FEM analysis for a range of different cases. Further, the model was validated by comparing the induced voltages of an accelerometer estimated using this model with experimental voltages measured in the accelerometer after fabrication. Subsequently, the design of an accelerometer is demonstrated for SHM applications using the analytical model developed in this work. The designed accelerometer has 60 mV/g voltage sensitivity and 2.4 pC/g charge sensitivity, which are relatively high values compared to those of the piezoresistive and capacitive accelerometers for SHM applications reported earlier.

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Section: E T E T E E T T T T T T D E T E Tmentioning

confidence: 99%

A Simple Analytical Model for MEMS Cantilever Beam Piezoelectric Accelerometer and High Sensitivity Design for SHM (structural health monitoring) Applications

Raaja¹,

Rathnasami²,

Sumangala³

2017

Transactions on Electrical and Electronic Materials

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“…In this work, the authors intend to generate the design guidelines for design and manufacture of piezoelectric accelerometers for structural health monitoring. Active materials with larger piezoelectric constants, such as PZT, can widen the performance gap of piezoelectric accelerometers [34,[37][38][39][40][41][42][43][44][45]. ZnO has also been employed for the active piezoelectric film due to relatively simple and repeatable deposition using single-target RF sputtering, the ability to produce large-area films without pinholes, and proven compatibility with IC integration [46][47][48].…”

Section: Introductionmentioning

confidence: 99%

Multiresonant Frequency Piezoelectric Energy Harvesters Integrated with High Sensitivity Piezoelectric Accelerometer for Bridge Health Monitoring Applications

Bhaskaran

Rathnasami

Sumangala

et al. 2017

Smart Materials Research

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Wireless Structural Health Monitoring (WSHM) is a less expensive but efficient mode of health monitoring. However, it needs frequent change of batteries since remote WSHM consumes large power. The best scientific solution to this problem is to employ energy harvesters integrated along with the vibration sensors in the same substrate so that the battery is recharged by the energy harvested during vibrations caused by the passing vehicles in bridges. In this work, an attempt has been made to design an energy harvester and a micro accelerometer integrated chip. Civil structures have low natural frequencies and therefore low bandwidth design is adopted to maximize the harvested energy and accelerometer sensitivity. The other special feature of the proposed design is its ability to provide further increase in energy harvesting by the parallel operation of an array of energy harvesters with closely spaced natural frequencies. The studies show that the natural frequencies of the harvesters should be less than that of the structure in healthy condition. Simulation studies conducted on these devices show that it is possible to harvest a maximum power of 2.283 mW/g. The integrated micro accelerometer is also capable of giving a sensitivity of 27.67 V/g with appreciable improvement in other performance indices.

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“…Piezoelectric Pb(Zr x Ti 1−x )O 3 (PZT) thick films have a high coupling factor and show small temperature dependence [3] making them ideal for sensors. Figure 1 shows a schematic drawing of the two MEMS devices of interest, (1) a tri-axial accelerometer, [4,5] and (2) a piezoelectric Micromachined Ultrasonic Transducer (pMUT) [6,7]. The two MEMS devices consist of a PZT thick film between a bottom and top electrode on a beam or membrane structure.…”

Section: Introductionmentioning

confidence: 99%

“…However, screen printed PZT has a rougher surface compared to other deposition techniques due to larger PZT grain sizes which introduces new fabrication challenges with respect to the top electrode formation as most planar processing is optimized for surfaces with a much lower surface roughness. So far most top electrodes on screen printed PZT thick films have been deposited using screen printing resulting in thickness of approximately 10 μm and maximum lateral resolution around 100 μm [4,12,13]. For optimal sensitivity of a MEMS device the top electrode should be as thin as possible, as a thicker top electrode makes a beam or membrane in a MEMS device more stiff.…”

Section: Introductionmentioning

confidence: 99%

Investigation of top electrode for PZT thick films based MEMS sensors

et al. 2010

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In this work processing of screen printed piezoelectric PZT thick films on silicon substrates is investigated for use in future MEMS devices. E-beam evaporated Al and Pt are patterned on PZT as a top electrode using a lift-off process with a line width down to 3 μm. Three test structures are used to investigate the optimal thickness of the top electrode, the degradation of the piezoelectric properties of the PZT film in absence of a diffusion barrier layer and finally how to fabricate electrical interconnects down the edge of the PZT thick film. The roughness of the PZT is found to have a strong influence on the conductance of the top electrode influencing the optimal top electrode thickness. A 100 nm thick top electrode on the PZT thick film with a surface roughness of 273 nm has a 4.5 times higher resistance compared to a similar wire on a planar SiO 2 surface which has a surface roughness of less than 10 nm. It is found that the piezoelectric properties of the PZT thick film are degraded up to 1,000 μm away from a region of the PZT thick film that is exposed directly to the silicon substrate without a diffusion barrier layer. Finally, ferroelectric hysteresis

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Microprocessor implemented self-validation of thick-film PZT/silicon accelerometer

Cited by 20 publications

References 10 publications

A Simple Analytical Model for MEMS Cantilever Beam Piezoelectric Accelerometer and High Sensitivity Design for SHM (structural health monitoring) Applications

A Simple Analytical Model for MEMS Cantilever Beam Piezoelectric Accelerometer and High Sensitivity Design for SHM (structural health monitoring) Applications

Multiresonant Frequency Piezoelectric Energy Harvesters Integrated with High Sensitivity Piezoelectric Accelerometer for Bridge Health Monitoring Applications

Investigation of top electrode for PZT thick films based MEMS sensors

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