This paper reviews the state-of-the art in vibration energy harvesting for wireless, self-powered microsystems. Vibration-powered generators are typically, although not exclusively, inertial spring and mass systems. The characteristic equations for inertial-based generators are presented, along with the specific damping equations that relate to the three main transduction mechanisms employed to extract energy from the system. These transduction mechanisms are: piezoelectric, electromagnetic and electrostatic. Piezoelectric generators employ active materials that generate a charge when mechanically stressed. A comprehensive review of existing piezoelectric generators is presented, including impact coupled, resonant and human-based devices. Electromagnetic generators employ electromagnetic induction arising from the relative motion between a magnetic flux gradient and a conductor. Electromagnetic generators presented in the literature are reviewed including large scale discrete devices and wafer-scale integrated versions. Electrostatic generators utilize the relative movement between electrically isolated charged capacitor plates to generate energy. The work done against the electrostatic force between the plates provides the harvested energy. Electrostatic-based generators are reviewed under the classifications of in-plane overlap varying, in-plane gap closing and out-of-plane gap closing; the Coulomb force parametric generator and electret-based generators are also covered. The coupling factor of each transduction mechanism is discussed and all the devices presented in the literature are summarized in tables classified by transduction type; conclusions are drawn as to the suitability of the various techniques.

Vibration energy harvesting is receiving a considerable amount of interest as a means for powering wireless sensor nodes. This paper presents a small (component volume 0.1 cm 3 , practical volume 0.15 cm 3 ) electromagnetic generator utilizing discrete components and optimized for a low ambient vibration level based upon real application data. The generator uses four magnets arranged on an etched cantilever with a wound coil located within the moving magnetic field. Magnet size and coil properties were optimized, with the final device producing 46 µW in a resistive load of 4 k from just 0.59 m s −2 acceleration levels at its resonant frequency of 52 Hz. A voltage of 428 mVrms was obtained from the generator with a 2300 turn coil which has proved sufficient for subsequent rectification and voltage step-up circuitry. The generator delivers 30% of the power supplied from the environment to useful electrical power in the load. This generator compares very favourably with other demonstrated examples in the literature, both in terms of normalized power density and efficiency.

This review presents possible strategies to increase the operational frequency range of vibration-based micro-generators. Most vibration-based micro-generators are spring-mass-damper systems which generate maximum power when the resonant frequency of the generator matches the frequency of the ambient vibration. Any difference between these two frequencies can result in a significant decrease in generated power. This is a fundamental limitation of resonant vibration generators which restricts their capability in real applications. Possible solutions include the periodic tuning of the resonant frequency of the generator so that it matches the frequency of the ambient vibration at all times or widening the bandwidth of the generator. Periodic tuning can be achieved using mechanical or electrical methods. Bandwidth widening can be achieved using a generator array, a mechanical stopper, nonlinear (e.g. magnetic) springs or bi-stable structures. Tuning methods can be classified into intermittent tuning (power is consumed periodically to tune the device) and continuous tuning (the tuning mechanism is continuously powered). This review presents a comprehensive review of the principles and operating strategies for increasing the operating frequency range of vibration-based micro-generators presented in the literature to date. The advantages and disadvantages of each strategy are evaluated and conclusions are drawn regarding the relevant merits of each approach.

This paper describes the design of miniature generators capable of converting ambient vibration energy into electrical energy for use in powering intelligent sensor systems. Such a device acts as the power supply of a microsystem which can be used in inaccessible areas where wires can not be practically attached to provide power or transmit sensor data. Two prototypes of miniature generator are described and experimental results presented. Prototype A is based around two magnets coupled to a coil attached to a cantilever; prototype B is based around four magnets.For prototype A, experimental results are given for its resonant frequency and its open circuit and loaded output as a function of vibration amplitude. For prototype B, experimental results are given for the generator's Q factor in air and vacuum, its output voltage as a function of vibration amplitude as well as its magnetic field strength. This generator has been tested on a car engine and shown to produce a peak power of 3.9 mW with an average power of 157 W.

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