Theoretical analysis of the sensing and actuating effects of piezoelectric multimorph cantilevers

Abstract

The paper presents the modeling of two types of piezoelectric microcantilevers, the two-layer and twosegment piezoelectric cantilevers, in which the two piezoelectric parts perform sensor and actuator functions, respectively. An analytic model is proposed to evaluate the sensing and actuating effects of multiporph microcantilevers formed of several layers or segments of piezoelectric materials. The analytical model is used to analyze the tip deflection of the cantilever and the piezoelectric charge generated on the sensor element as a function of the microcantilever geometry. The cantilevers of sensing and actuation are compared for the different working situations of the two-layer and two-segment cantilevers. The theoretical results can be used to optimize the design of the piezoelectric cantilever structures.

FEM analysis of the vibrational motion of oblique piezoelectric microcantilever in the vicinity of a sample surface in liquid

“…Thereby, the AFM becomes capable of imaging with more speed and accuracy [2]. These features have induced the researchers to pay more attention to the operation of this type of MC compared to its previous one [3]. A liquid environment affects the MC motion and influences the imaging accuracy.…”

Effect of geometrical and environmental parameters on vibration of multi-layered piezoelectric microcantilever in amplitude mode

“…This paper is focused on the test of integration of sensor and actuator. Liu et al [3] presented modeling of two types of piezoelectric MCs, the two-layer and two-segment piezoelectric cantilevers. The tip deflection of the cantilever and the piezoelectric charge generated on the sensor element were analyzed and compared for the different working situations.…”

“…According to this ability, multi-layered cantilevers included two piezoelectric layers can perform both actuation and sensing simultaneously. Since the use of these microcantilevers (MCs) improved the speed, simplicity and versatility of tapping mode AFM (cause the system to be compact and additionally, make it easier to work), the multi-layered cantilever has been attentioned [3].…”

Nonlinear modeling of piezoelectric layered beams

“…Modeling of these devices has been the subject of many researches [10][11][12][13][14][15][16][17][18] . However, most of these works have concentrated on linear assumptions of the device, whereas many recent applications of these devices need high voltage actuation.…”