Experimental Study on the Quality of Material Surface Applied Laser-Chemical Combined Etching

Genfu, 袁根福 Yuan; Yansheng, 姚燕生 Yao; Xuehui, 陈雪辉 Chen; Huaqi, 梁华琪 Liang; Shaofeng, 朱绍峰 Zhu

doi:10.3788/cjl20103701.0281

Cited by 6 publications

(4 citation statements)

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“…They studied the basic etching silicon appearances and found the quality and verticality of cavities were fine. Based on the laser assisted wet etching ,a proposed new technique could solve the problem about difficult machining process for large scale hard-to-machine material by Genfu Yuan et al [9]. It is called Laser-Chemcial Combined Etching.…”

Section: Laser Assisted Wet Etching Machiningmentioning

confidence: 99%

Research Progress of Laser Assisted Liquid Compound Machining

Yuan

Zheng

Chen

et al. 2011

AMR

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Laser combined machining is a complex machining method which utilizes the combined effect of various forms of energy to achieve a material processing. High manufacturing quality and surface accuracy, and machining efficiency can be achieved. The research progress in the area of laser combined other machine processes is reviewed. Several methods of laser combined machining are introduced and their characteristics and applications from the point of the laser assisted liquid machining are investigated. For example, laser assisted wet etching and laser assisted jet electrochemical machining, and waterjet-guided laser machining are reported. The experimental and theoretical studies of the technologies to improve the machining performance are discussed. Finally, the existing problems and the future research directions of the laser compound processing are put forward .

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Section: Laser Assisted Wet Etching Machiningmentioning

confidence: 99%

Research Progress of Laser Assisted Liquid Compound Machining

Yuan

Zheng

Chen

et al. 2011

AMR

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“…EDM technology is also utilized to machine Si 3 N 4 , but the process requires an auxiliary electrode on account of its non-conductive property and this technology is inefficient. Laser has many exceptional properties like high energy density and fine focus that can be used to machine any material, but laser machining alone can cause heat damage and crack in ceramic surface [3][4][5][6].Then, Yuan Genfu proposed and studied laser-chemical combined etching and low-pressure water jet-assisted laser machining [7,8]. Park and Kang performed some researches, in which the method of vibration-assisted laser machining was used to machine workpiece in anhydrous conditions [9,10].…”

Section: Introductionmentioning

confidence: 99%

Study on Ultrasonic-Assisted Laser Machining of Si3N4

Yao

Wang

et al. 2016

KEM

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Si3N4 is difficult to be machined due to its hard and brittle nature. In order to improve its machining quality, a new method of ultrasonic-assisted laser machining is proposed. The machining device is established including Nd: YAG pulsed laser, ultrasonic vibration stage and water flow system. Etching experiments of laser machining with and without sample vibration in anhydrous conditions and in water conditions are studied respectively. A VM-3030E two-dimensional image measuring instrument is applied to detect shape and measure dimension of the sample. Microstructure morphology of the sample is observed by a JSM-7500F scanning electron microscope. Experimental results show that there are fewer slags on inner surfaces of V-shaped grooves when laser machining with water flow. The surface quality and depth-to-width ratio of grooves machined by laser with vibration on sample are improved significantly in comparison with those without vibration. The depth-to-width ratio of groove machined by laser with 90.1W vibration power is near twice than that without vibration.

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“…The surface quality is seriously affected by the recast layer, micro cracks and thermal deformation [6]. Thus, much research was done to reduce or eliminate the recast layer, micro cracks and thermal deformation during laser machining [7,8]. In 1990s, water-jet guided laser machining, leading focused laser beam in a High-speed flowing jet which can transfer and guide the laser, was invented by the Institute of Applied Optics of the Swiss Federal Institute of Technology [9].…”

Section: Introductionmentioning

confidence: 99%

Experimental Study of Low-Pressure Water Jet Assisted Laser Processing of Al2O3 Ceramic

Wang

Yuan

2013

AMR

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Recast layer, micro cracks and thermal deformation limited the improvement of the surface quality of laser processing in precision machining of hard and brittle material. This paper presents a new method which combines low-pressure water jet with laser processing. A comprehensive study on the influence of laser processing parameters on surface quality of an Al2O3 ceramic sheet is presented. The experiment was conducted using ND: YAG laser machine and low-pressure water jet was used as assist. The surface quality of normal laser processing and low-pressure water jet assisted laser processing was comparative analyzed using a 3-D microscopy. Experiment proves that the composite processing of low-pressure water jet assisted laser processing can obtain good surface quality, slight moltenslag and thermal deformation, compared with the normal laser processing.

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Experimental Study on the Quality of Material Surface Applied Laser-Chemical Combined Etching

Cited by 6 publications

References 0 publications

Research Progress of Laser Assisted Liquid Compound Machining

Research Progress of Laser Assisted Liquid Compound Machining

Study on Ultrasonic-Assisted Laser Machining of Si<sub>3</sub>N<sub>4</sub>

Experimental Study of Low-Pressure Water Jet Assisted Laser Processing of Al<sub>2</sub>O<sub>3</sub> Ceramic

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